CL

Chi-Ta Lu

TSMC: 19 patents #1,728 of 12,232Top 15%
Overall (All Time): #228,956 of 4,157,543Top 6%
19
Patents All Time

Issued Patents All Time

Showing 1–19 of 19 patents

Patent #TitleCo-InventorsDate
12293969 Semiconductor structure and manufacturing method thereof Chi-Ming Tsai 2025-05-06
12254258 Critical dimension uniformity Chi-Ming Tsai 2025-03-18
12174529 Method for manufacturing semiconductor device Wei-Chung Hu, Chi-Ming Tsai 2024-12-24
12124163 Mask defect prevention Chih-Chiang Tu, Cheng-Ming Lin, Ching-Yueh Chen, Wei-Chung Hu, Ting-Chang Hsu +1 more 2024-10-22
11900040 Method and system for reducing layout distortion due to exposure non-uniformity CHIA-HUI LIAO, Yihung Lin, Chi-Ming Tsai 2024-02-13
11860530 Mask defect prevention Chih-Chiang Tu, Cheng-Ming Lin, Ching-Yueh Chen, Wei-Chung Hu, Ting-Chang Hsu +1 more 2024-01-02
11763057 Critical dimension uniformity Chi-Ming Tsai 2023-09-19
11476193 Semiconductor structure and manufacturing method thereof Chi-Ming Tsai 2022-10-18
11429019 Method for manufacturing semiconductor device Wei-Chung Hu, Chi-Ming Tsai 2022-08-30
11402743 Mask defect prevention Chih-Chiang Tu, Cheng-Ming Lin, Ching-Yueh Chen, Wei-Chung Hu, Ting-Chang Hsu +1 more 2022-08-02
11308254 Method and system for reducing layout distortion due to exposure non-uniformity CHIA-HUI LIAO, Yihung Lin, Chi-Ming Tsai 2022-04-19
11209728 Mask and method for fabricating the same Huang-Ming Wu, JIUN-HAO LIN, Jia-Guei Jou, Chi-Ming Tsai 2021-12-28
11055464 Critical dimension uniformity Chi-Ming Tsai 2021-07-06
10877380 Using inverse lithography technology in a method of mask data preparation for generating integrated circuit Yihung Lin, Yi-Feng Lu, Huang-Ming Wu 2020-12-29
10866508 Method for manufacturing photomask and semiconductor manufacturing method thereof Wei-Chung Hu, Chi-Ming Tsai 2020-12-15
10784196 Semiconductor structure and manufacturing method thereof Chi-Ming Tsai 2020-09-22
9136092 Structure and method for E-beam writing Jia-Guei Jou, Yi-Hsien Chen, Peng Chen, Dong-Hsu Cheng 2015-09-15
8650511 Lithography performance check methods and apparatus Peng Chen, Dong-Hsu Cheng, Chang-Jyh Hsieh 2014-02-11
8458631 Cycle time reduction in data preparation Jia-Guei Jou, Peng Chen, Dong-Hsu Cheng 2013-06-04