Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11900040 | Method and system for reducing layout distortion due to exposure non-uniformity | Chi-Ta Lu, CHIA-HUI LIAO, Chi-Ming Tsai | 2024-02-13 |
| 11308254 | Method and system for reducing layout distortion due to exposure non-uniformity | Chi-Ta Lu, CHIA-HUI LIAO, Chi-Ming Tsai | 2022-04-19 |
| 10877380 | Using inverse lithography technology in a method of mask data preparation for generating integrated circuit | Yi-Feng Lu, Huang-Ming Wu, Chi-Ta Lu | 2020-12-29 |