Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12013632 | Pellicle having vent hole | Chue-San Yoo, Chih-Chiang Tu, Chien-Cheng Chen, Kun-Lung Hsieh, Pei-Cheng Hsu +2 more | 2024-06-18 |
| 11906897 | Method for extreme ultraviolet lithography mask treatment | Pei-Cheng Hsu, Yih-Chen Su, Chi-Kuang Tsai, Ta-Cheng Lien, Tzu Yi Wang +1 more | 2024-02-20 |
| 11143952 | Pellicle removal method | Chue-San Yoo, Chih-Chiang Tu, Chien-Cheng Chen, Kun-Lung Hsieh, Pei-Cheng Hsu +2 more | 2021-10-12 |
| 11048158 | Method for extreme ultraviolet lithography mask treatment | Pei-Cheng Hsu, Yih-Chen Su, Chi-Kuang Tsai, Ta-Cheng Lien, Tzu Yi Wang +1 more | 2021-06-29 |
| 10859906 | Extreme ultraviolet alignment marks | Yi-Fu Hsieh, Chih-Chiang Tu, Hsin-Chang Lee | 2020-12-08 |
| 10345695 | Extreme ultraviolet alignment marks | Yi-Fu Hsieh, Chih-Chiang Tu, Hsin-Chang Lee | 2019-07-09 |
| 10156783 | Image mask film scheme and method | Chih-Chiang Tu, Chun-Lang Chen, Boming Hsu, Tran-Hui Shen | 2018-12-18 |
| 10157805 | Moveable and adjustable gas injectors for an etching chamber | Tzung-Shiun Lu, Chun-Lang Chen, Shih-Hao Yang | 2018-12-18 |
| 10012899 | Graphene pellicle for extreme ultraviolet lithography | Chih-Chiang Tu, Chun-Lang Chen, Chue-San Yoo, Chia-Shiung Tsai, Ping-Yin Liu +3 more | 2018-07-03 |
| 9689805 | Systems and methods eliminating false defect detections | Biow Hiem Ong, Chih-Chiang Tu, Chien-Hung Lai, Kuang-Yu Liu | 2017-06-27 |
| 9581894 | Image mask film scheme and method | Chih-Chiang Tu, Chun-Lang Chen, Boming Hsu, Tran-Hui Shen | 2017-02-28 |
| 9529255 | Image process method to improve mask inspection performance | Meng-Lin Lu, Ching-Ting Yang, Chun-Jen Chen, Chien-Hung Lai | 2016-12-27 |
| 9377701 | Mask overlay control | Chih-Chiang Tu, Chun-Lang Chen, Chien-Chih Chen, Chen-Shao Hsu | 2016-06-28 |
| 9373551 | Moveable and adjustable gas injectors for an etching chamber | Tzung-Shiun Lu, Chun-Lang Chen, Shih-Hao Yang | 2016-06-21 |
| 9122175 | Image mask film scheme and method | Chih-Chiang Tu, Chun-Lang Chen, Boming Hsu, Tran-Hui Shen | 2015-09-01 |
| 9063097 | Systems and methods eliminating false defect detections | Biow Hiem Ong, Chien-Hung Lai, Chih-Chiang Tu, Kuang-Yu Liu | 2015-06-23 |
| 9057961 | Systems and methods for lithography masks | Chih-Chiang Tu, Hsin-Chang Lee, Chia-Jen Chen, Chun-Lang Chen | 2015-06-16 |
| 9017903 | Mask overlay control | Chih-Chiang Tu, Chun-Lang Chen, Chien-Chih Chen, Chen-Shao Hsu | 2015-04-28 |
| 8999611 | Mask blank for scattering effect reduction | Chih-Chiang Tu, Chun-Lang Chen, Chien-Chih Chen, Chen-Shao Hsu | 2015-04-07 |
| 8818072 | Rendered database image-to-inspection image optimization for inspection | Biow Hiem Ong, Rick Lai, Chih-Chiang Tu, Chia-Shih Lin | 2014-08-26 |
| 8792078 | Method and pellicle mounting apparatus for reducing pellicle induced distortion | Cheng-Ming Lin, Chien-Chao Huang, Chia-Wei Chang, Boming Hsu | 2014-07-29 |
| 8785083 | Systems and methods for lithography masks | Chih-Chiang Tu, Hsin-Chang Lee, Chia-Jen Chen, Chun-Lang Chen | 2014-07-22 |
| 8629407 | Contamination inspection | Chien-Hung Lai, Biow Hiem Ong, Chia-Shih Lin, Chih-Chiang Tu | 2014-01-14 |