Issued Patents All Time
Showing 1–25 of 90 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12393129 | Method and device for cleaning substrates | Chung-Hsuan Liu, Chen-Yang Lin, Ku-Hsiang Sung, Da-Wei Yu, Kuan-Wen Lin +1 more | 2025-08-19 |
| 12366798 | Lithography mask and methods | Chien-Cheng Chen, Huan-Ling Lee, Ta-Cheng Lien, Hsin-Chang Lee | 2025-07-22 |
| 12339582 | Photomask including fiducial mark and method of making a photomask | Hsin-Chang Lee, Ping-Hsun Lin, Chih-Cheng Lin | 2025-06-24 |
| 12298673 | Method of manufacturing photo masks | Chien-Cheng Chen, Hsin-Chang Lee, Shih-Ming Chang, Tran-Hui Shen, Yen-Cheng HO +1 more | 2025-05-13 |
| 12265322 | EUV mask blank and method of making EUV mask blank | Ping-Hsun Lin, Pei-Cheng Hsu, Ching-Fang Yu, Ta-Cheng Lien, Hsin-Chang Lee | 2025-04-01 |
| 12243872 | Semiconductor device structure and methods of forming the same | Chen-Huang Huang, Yu-Ling Cheng, Shun-Hui Yang, An Chyi Wei, Shang-Shuo HUANG +2 more | 2025-03-04 |
| 12218130 | Semiconductor structure cutting process and structures formed thereby | Chih-Chang Hung, Ming-Ching Chang, Shu-Yuan Ku, Yi-Hsuan Hsiao, I-Wei Yang | 2025-02-04 |
| 12147154 | EUV photo masks and manufacturing method thereof | Hsin-Chang Lee, Pei-Cheng Hsu, Ta-Cheng Lien | 2024-11-19 |
| 12130548 | Extreme ultraviolet mask with reduced wafer neighboring effect | Wen-Chang Hsueh, Huan-Ling Lee, Hsin-Chang Lee | 2024-10-29 |
| 12107149 | Air spacer and method of forming same | Ming-Jhe Sie, Chen-Huang Huang, Shao-Hua Hsu, Cheng-Chung Chang, Szu-Ping Lee +2 more | 2024-10-01 |
| 12085866 | Particle removing assembly and method of cleaning mask for lithography | Chen-Yang Lin, Da-Wei Yu, Li-Hsin Wang, Kuan-Wen Lin, Hsin-Chang Lee | 2024-09-10 |
| 12038693 | Method of manufacturing photo masks | Chien-Cheng Chen, Hsin-Chang Lee, Shih-Ming Chang, Tran-Hui Shen, Yen-Cheng HO +1 more | 2024-07-16 |
| 12032302 | Method and device for cleaning substrates | Chung-Hsuan Liu, Chen-Yang Lin, Ku-Hsiang Sung, Da-Wei Yu, Kuan-Wen Lin +1 more | 2024-07-09 |
| 11982936 | Photomask and method of fabricating a photomask | Hsin-Chang Lee, Ping-Hsun Lin, Yen-Cheng HO, Chih-Cheng Lin | 2024-05-14 |
| 11899357 | Lithography mask | Chien-Cheng Chen, Huan-Ling Lee, Ta-Cheng Lien, Hsin-Chang Lee | 2024-02-13 |
| 11860532 | Photomask including fiducial mark and method of making a semiconductor device using the photomask | Hsin-Chang Lee, Ping-Hsun Lin, Chih-Cheng Lin | 2024-01-02 |
| 11855085 | Semiconductor structure cutting process and structures formed thereby | Chih-Chang Hung, Ming-Ching Chang, Shu-Yuan Ku, Yi-Hsuan Hsiao, I-Wei Yang | 2023-12-26 |
| 11852966 | Lithography mask with a black border regions and method of fabricating the same | Chin-Hsiang Lin, Chien-Cheng Chen, Hsin-Chang Lee, Pei-Cheng Hsu, Yih-Chen Su +2 more | 2023-12-26 |
| 11815804 | EUV mask blank and method of making EUV mask blank | Ping-Hsun Lin, Pei-Cheng Hsu, Ching-Fang Yu, Ta-Cheng Lien, Hsin-Chang Lee | 2023-11-14 |
| 11740547 | Method of manufacturing extreme ultraviolet mask with reduced wafer neighboring effect | Wen-Chang Hsueh, Huan-Ling Lee, Hsin-Chang Lee | 2023-08-29 |
| 11698592 | Particle removing assembly and method of cleaning mask for lithography | Chen-Yang Lin, Da-Wei Yu, Li-Hsin Wang, Kuan-Wen Lin, Hsin-Chang Lee | 2023-07-11 |
| 11687006 | Method of manufacturing photo masks | Chien-Cheng Chen, Hsin-Chang Lee, Shih-Ming Chang, Tran-Hui Shen, Yen-Cheng HO +1 more | 2023-06-27 |
| 11652155 | Air spacer and method of forming same | Ming-Jhe Sie, Chen-Huang Huang, Shao-Hua Hsu, Cheng-Chung Chang, Szu-Ping Lee +2 more | 2023-05-16 |
| 11619875 | EUV photo masks and manufacturing method thereof | Hsin-Chang Lee, Pei-Cheng Hsu, Ta-Cheng Lien | 2023-04-04 |
| 11444080 | Semiconductor structure cutting process and structures formed thereby | Chih-Chang Hung, Ming-Ching Chang, Shu-Yuan Ku, Yi-Hsuan Hsiao, I-Wei Yang | 2022-09-13 |