Issued Patents All Time
Showing 1–25 of 76 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12416853 | EUV photo masks and manufacturing method thereof | Ta-Cheng Lien, Hsin-Chang Lee | 2025-09-16 |
| 12346021 | Simultaneous carbon nanotube growth, catalyst removal, boron nitride nanotube shell formation method for EUV pellicles | Huan-Ling Lee, Hsin-Chang Lee, Chin-Hsiang Lin | 2025-07-01 |
| 12346019 | Reflective mask | Ta-Cheng Lien, Hsin-Chang Lee | 2025-07-01 |
| 12346023 | Optical assembly with coating and methods of use | Ping-Hsun Lin, Ta-Cheng Lien, Hsin-Chang Lee | 2025-07-01 |
| 12346020 | Optical assembly with coating and methods of use | Ping-Hsun Lin, Ta-Cheng Lien, Hsin-Chang Lee | 2025-07-01 |
| 12346027 | Methods of making a semiconductor device | Ching-Huang Chen, Hung-Yi Tsai, Ming-Wei Chen, Hsin-Chang Lee, Ta-Cheng Lien | 2025-07-01 |
| 12339579 | Method of critical dimension control by oxygen and nitrogen plasma treatment in EUV mask | Chun-Fu Yang, Ta-Cheng Lien, Hsin-Chang Lee | 2025-06-24 |
| 12265322 | EUV mask blank and method of making EUV mask blank | Ping-Hsun Lin, Ching-Fang Yu, Ta-Cheng Lien, Chia-Jen Chen, Hsin-Chang Lee | 2025-04-01 |
| 12259649 | Cleaning method for photo masks and apparatus therefor | Hsin-Chang Lee, Hao-Ping Cheng, Ta-Cheng Lien | 2025-03-25 |
| 12181797 | Extreme ultraviolet mask with alloy based absorbers | Ping-Hsun Lin, Ta-Cheng Lien, Hsin-Chang Lee | 2024-12-31 |
| 12169357 | Method of fabricating and servicing a photomask | Chun-Fu Yang, Ta-Cheng Lien, Hsin-Chang Lee | 2024-12-17 |
| 12153337 | Extreme ultraviolet mask with tantalum base alloy absorber | Ta-Cheng Lien, Hsin-Chang Lee | 2024-11-26 |
| 12153339 | Network type pellicle membrane and method for forming the same | Ta-Cheng Lien, Hsin-Chang Lee | 2024-11-26 |
| 12147154 | EUV photo masks and manufacturing method thereof | Hsin-Chang Lee, Chia-Jen Chen, Ta-Cheng Lien | 2024-11-19 |
| 12135499 | Reticle enclosure for lithography systems | Ta-Cheng Lien, Hsin-Chang Lee | 2024-11-05 |
| 12092952 | Methods for forming extreme ultraviolet mask comprising magnetic material | Kevin TANADY, Ta-Cheng Lien, Tzu Yi Wang, Hsin-Chang Lee | 2024-09-17 |
| 12085843 | Method of manufacturing EUV photo masks | Hsin-Chang Lee, Ta-Cheng Lien, Tzu Yi Wang | 2024-09-10 |
| 12050399 | Pellicle assembly and method of making same | Hsin-Chang Lee, Ta-Cheng Lien, Li-Jui Chen, Tsai-Sheng Gau, Chin-Hsiang Lin | 2024-07-30 |
| 12044960 | EUV photo masks and manufacturing method thereof | Ching-Huang Chen, Hung-Yi Tsai, Ming-Wei Chen, Hsin-Chang Lee, Ta-Cheng Lien | 2024-07-23 |
| 12038684 | Reflective mask and fabricating method thereof | Tsiao-Chen Wu | 2024-07-16 |
| 12019367 | Mask blanks and methods for depositing layers on mask blank | Hsin-Chang Lee, Ta-Cheng Lien, Wen-Chang Hsueh | 2024-06-25 |
| 12013632 | Pellicle having vent hole | Chue-San Yoo, Chih-Chiang Tu, Chien-Cheng Chen, Jong-Yuh Chang, Kun-Lung Hsieh +2 more | 2024-06-18 |
| 12013630 | EUV photo masks and manufacturing method thereof | Ta-Cheng Lien, Hsin-Chang Lee | 2024-06-18 |
| 12001132 | Protection layer on low thermal expansion material (LTEM) substrate of extreme ultraviolet (EUV) mask | Ta-Cheng Lien, Ping-Hsun Lin, Shih-Che Wang, Hsin-Chang Lee | 2024-06-04 |
| 11988953 | EUV masks to prevent carbon contamination | Ta-Cheng Lien, Hsin-Chang Lee | 2024-05-21 |