Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12339579 | Method of critical dimension control by oxygen and nitrogen plasma treatment in EUV mask | Pei-Cheng Hsu, Ta-Cheng Lien, Hsin-Chang Lee | 2025-06-24 |
| 12169357 | Method of fabricating and servicing a photomask | Pei-Cheng Hsu, Ta-Cheng Lien, Hsin-Chang Lee | 2024-12-17 |
| 11960201 | Method of critical dimension control by oxygen and nitrogen plasma treatment in EUV mask | Pei-Cheng Hsu, Ta-Cheng Lien, Hsin-Chang Lee | 2024-04-16 |
| 11714350 | Method of fabricating and servicing a photomask | Pei-Cheng Hsu, Ta-Cheng Lien, Hsin-Chang Lee | 2023-08-01 |
| 11650493 | Method of critical dimension control by oxygen and nitrogen plasma treatment in EUV mask | Pei-Cheng Hsu, Ta-Cheng Lien, Hsin-Chang Lee | 2023-05-16 |
| 11360384 | Method of fabricating and servicing a photomask | Pei-Cheng Hsu, Ta-Cheng Lien, Hsin-Chang Lee | 2022-06-14 |
| 11215918 | Method of critical dimension control by oxygen and nitrogen plasma treatment in EUV mask | Pei-Cheng Hsu, Ta-Cheng Lien, Hsin-Chang Lee | 2022-01-04 |