Issued Patents All Time
Showing 51–75 of 76 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11215918 | Method of critical dimension control by oxygen and nitrogen plasma treatment in EUV mask | Chun-Fu Yang, Ta-Cheng Lien, Hsin-Chang Lee | 2022-01-04 |
| 11204545 | EUV photo masks and manufacturing method thereof | Ching-Huang Chen, Hung-Yi Tsai, Ming-Wei Chen, Ta-Cheng Lien, Hsin-Chang Lee | 2021-12-21 |
| 11143952 | Pellicle removal method | Chue-San Yoo, Chih-Chiang Tu, Chien-Cheng Chen, Jong-Yuh Chang, Kun-Lung Hsieh +2 more | 2021-10-12 |
| 11119398 | EUV photo masks | Hsin-Chang Lee, Ping-Hsun Lin, Ta-Cheng Lien, Tzu Yi Wang | 2021-09-14 |
| 11106126 | Method of manufacturing EUV photo masks | Hsin-Chang Lee, Ta-Cheng Lien, Tzu Yi Wang | 2021-08-31 |
| 11048158 | Method for extreme ultraviolet lithography mask treatment | Yih-Chen Su, Chi-Kuang Tsai, Ta-Cheng Lien, Tzu Yi Wang, Jong-Yuh Chang +1 more | 2021-06-29 |
| 11029593 | Lithography mask with a black border regions and method of fabricating the same | Chin-Hsiang Lin, Chien-Cheng Chen, Hsin-Chang Lee, Chia-Jen Chen, Yih-Chen Su +2 more | 2021-06-08 |
| 10866504 | Lithography mask with a black border region and method of fabricating the same | Chin-Hsiang Lin, Chien-Cheng Chen, Hsin-Chang Lee, Chia-Jen Chen, Yih-Chen Su +2 more | 2020-12-15 |
| 10670959 | Pellicle and method of using the same | Chue-San Yoo, Hsin-Chang Lee, Yun-Yue Lin | 2020-06-02 |
| 10595693 | Dust collector using fan heat and dust collector having ironing function | — | 2020-03-24 |
| 10353285 | Pellicle structures and methods of fabricating thereof | Hsin-Chang Lee, Yun-Yue Lin, Hsuan-Chen Chen, Hsuan-I WANG, Anthony Yen | 2019-07-16 |
| 10274819 | EUV pellicle fabrication methods and structures thereof | Chih-Tsung Shih, Jeng-Horng Chen, Chih-Cheng Lin, Hsin-Chang Lee, Shinn-Sheng Yu +2 more | 2019-04-30 |
| 10036951 | Pellicle assembly and fabrication methods thereof | Chih-Cheng Lin, Hsin-Chang Lee, Ta-Cheng Lien, Anthony Yen | 2018-07-31 |
| 10001701 | Pellicle structures and methods of fabricating thereof | Hsin-Chang Lee, Yun-Yue Lin, Hsuan-Chen Chen, Hsuan-I WANG, Anthony Yen | 2018-06-19 |
| 9897910 | Treating a capping layer of a mask | Chih-Cheng Lin, Ta-Cheng Lien, Wei-Shiuan Chen, Hsin-Chang Lee, Anthony Yen | 2018-02-20 |
| 9857679 | Lithography mask and fabricating the same | Ta-Cheng Lien, Tzu-Ling Liu | 2018-01-02 |
| 9735065 | Systems and methods of local focus error compensation for semiconductor processes | Chia-Hao Hsu, Chia-Ching Huang, Chih-Ming Chen, Chia-Chen Chen | 2017-08-15 |
| 9535317 | Treating a capping layer of a mask | Chih-Cheng Lin, Ta-Cheng Lien, Wei-Shiuan Chen, Hsin-Chang Lee, Anthony Yen | 2017-01-03 |
| 9244341 | Photomask and method for forming the same | Hsin-Chang Lee, Chia-Jen Chen, Anthony Yen | 2016-01-26 |
| 9215961 | Automatic floor cleaning machine | — | 2015-12-22 |
| 9213232 | Reflective mask and method of making same | Chih-Tsung Shih, Chia-Jen Chen, Tsiao-Chen Wu, Shinn-Sheng Yu, Hsin-Chang Lee +1 more | 2015-12-15 |
| 9138120 | Automatic floor cleaner | — | 2015-09-22 |
| 9003337 | Systems and methods of local focus error compensation for semiconductor processes | Chia-Hao Hsu, Chia-Ching Huang, Chih-Ming Chen, Chia-Chen Chen | 2015-04-07 |
| 8962222 | Photomask and method for forming the same | Hsin-Chang Lee, Chia-Jen Chen, Anthony Yen | 2015-02-24 |
| 8877409 | Reflective mask and method of making same | Chih-Tsung Shih, Chia-Jen Chen, Tsiao-Chen Wu, Shinn-Sheng Yu, Hsin-Chang Lee +1 more | 2014-11-04 |