Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11906897 | Method for extreme ultraviolet lithography mask treatment | Pei-Cheng Hsu, Chi-Kuang Tsai, Ta-Cheng Lien, Tzu Yi Wang, Jong-Yuh Chang +1 more | 2024-02-20 |
| 11852966 | Lithography mask with a black border regions and method of fabricating the same | Chin-Hsiang Lin, Chien-Cheng Chen, Hsin-Chang Lee, Chia-Jen Chen, Pei-Cheng Hsu +2 more | 2023-12-26 |
| 11048158 | Method for extreme ultraviolet lithography mask treatment | Pei-Cheng Hsu, Chi-Kuang Tsai, Ta-Cheng Lien, Tzu Yi Wang, Jong-Yuh Chang +1 more | 2021-06-29 |
| 11029593 | Lithography mask with a black border regions and method of fabricating the same | Chin-Hsiang Lin, Chien-Cheng Chen, Hsin-Chang Lee, Chia-Jen Chen, Pei-Cheng Hsu +2 more | 2021-06-08 |
| 10866504 | Lithography mask with a black border region and method of fabricating the same | Chin-Hsiang Lin, Chien-Cheng Chen, Hsin-Chang Lee, Chia-Jen Chen, Pei-Cheng Hsu +2 more | 2020-12-15 |
| 8916482 | Method of making a lithography mask | Hsin-Chang Lee, Yun-Yue Lin, Hung-Chang Hsieh, Chia-Jen Chen, Ta-Cheng Lien +1 more | 2014-12-23 |
| 6962878 | Method to reduce photoresist mask line dimensions | Chao-Tzung Tsai | 2005-11-08 |