Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183405 | Semiconductor manufacturing apparatus | Tzu Ken Lin, I-Chang Wu, Ching-Lun Lai, Li-Jia Liou | 2021-11-23 |
| 10269599 | Semiconductor manufacturing apparatus | Tzu Ken Lin, I-Chang Wu, Ching-Lun Lai, Li-Jia Liou | 2019-04-23 |
| 7339253 | Retrograde trench isolation structures | Ling-Sung Wang, Ching Lang Yen | 2008-03-04 |
| 7301645 | In-situ critical dimension measurement | Shiang-Bau Wang, Yuan-Hung Chiu, Hun-Jan Tao | 2007-11-27 |
| 6962878 | Method to reduce photoresist mask line dimensions | Yih-Chen Su | 2005-11-08 |
| 6878646 | Method to control critical dimension of a hard masked pattern | Jia-Sheng Wu, Fuxuan Fang | 2005-04-12 |