Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11906897 | Method for extreme ultraviolet lithography mask treatment | Pei-Cheng Hsu, Yih-Chen Su, Ta-Cheng Lien, Tzu Yi Wang, Jong-Yuh Chang +1 more | 2024-02-20 |
| 11048158 | Method for extreme ultraviolet lithography mask treatment | Pei-Cheng Hsu, Yih-Chen Su, Ta-Cheng Lien, Tzu Yi Wang, Jong-Yuh Chang +1 more | 2021-06-29 |