Issued Patents All Time
Showing 1–25 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12429760 | Method for forming structure of pellicle-mask structure with vent structure | — | 2025-09-30 |
| 12298662 | Mask for EUV lithography and method of manufacturing the same | — | 2025-05-13 |
| 12266525 | Photomask pellicle including network of nanowires and method of forming the same | Chen-Chieh Yu | 2025-04-01 |
| 12253796 | Extreme ultraviolet mask and method for forming the same | — | 2025-03-18 |
| 12253797 | Pellicle design for mask application | — | 2025-03-18 |
| 12222639 | Extreme ultraviolet mask and method of manufacturing the same | — | 2025-02-11 |
| 12210280 | EUV photo masks and manufacturing method thereof | — | 2025-01-28 |
| 12174527 | Pellicle for an EUV lithography mask and a method of manufacturing thereof | — | 2024-12-24 |
| 12117725 | Pellicle for an EUV lithography mask and a method of manufacturing thereof | — | 2024-10-15 |
| 12066755 | Pellicle for an EUV lithography mask and a method of manufacturing thereof | — | 2024-08-20 |
| 12055855 | Extreme ultraviolet lithography method using robust, high transmission pellicle | — | 2024-08-06 |
| 12013632 | Pellicle having vent hole | Chue-San Yoo, Chih-Chiang Tu, Chien-Cheng Chen, Jong-Yuh Chang, Kun-Lung Hsieh +2 more | 2024-06-18 |
| 12007685 | Method for forming structure of pellicle-mask structure with vent structure | — | 2024-06-11 |
| 11923196 | Photomask pellicle and method of forming the same | Chen-Chieh Yu | 2024-03-05 |
| 11914286 | Pellicle assembly and method for advanced lithography | Amo Chen, Ta-Cheng Lien, Hsin-Chang Lee, Chih-Cheng Lin, Jeng-Horng Chen | 2024-02-27 |
| 11886109 | EUV photo masks and manufacturing method thereof | — | 2024-01-30 |
| 11868041 | Pellicle and method of using the same | Chue-San Yoo, Hsin-Chang Lee, Pei-Cheng Hsu | 2024-01-09 |
| 11846880 | Extreme ultraviolet mask and method for forming the same | — | 2023-12-19 |
| 11789355 | Extreme ultraviolet mask and method of manufacturing the same | — | 2023-10-17 |
| 11782339 | Pellicle for an EUV lithography mask and a method of manufacturing thereof | — | 2023-10-10 |
| 11762282 | Pellicle design for mask | — | 2023-09-19 |
| 11740549 | Extreme ultraviolet lithography method, extreme ultraviolet mask and formation method thereof | — | 2023-08-29 |
| 11662661 | EUV pellicle with structured ventilation frame | — | 2023-05-30 |
| 11656544 | Robust, high transmission pellicle for extreme ultraviolet lithography systems | — | 2023-05-23 |
| 11526073 | Pellicle and method of manufacturing same | Po Hsuan Li, Yu-Ting Lin, Huai-Tei Yang | 2022-12-13 |