Issued Patents All Time
Showing 51–68 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10162258 | Pellicle fabrication methods and structures thereof | Hsuan-Chen Chen, Chih-Cheng Lin, Hsin-Chang Lee, Yao-Ching Ku, Wei-Jen Lo +3 more | 2018-12-25 |
| 10012899 | Graphene pellicle for extreme ultraviolet lithography | Chih-Chiang Tu, Chun-Lang Chen, Chue-San Yoo, Jong-Yuh Chang, Chia-Shiung Tsai +3 more | 2018-07-03 |
| 10001701 | Pellicle structures and methods of fabricating thereof | Pei-Cheng Hsu, Hsin-Chang Lee, Hsuan-Chen Chen, Hsuan-I WANG, Anthony Yen | 2018-06-19 |
| 9995999 | Lithography mask | Hsin-Chang Lee, Chia-Jen Chen, Anthony Yen | 2018-06-12 |
| 9864270 | Pellicle and method for manufacturing the same | Jeng-Shin Ma, Tsiao-Chen Wu, Chi-Ming Yang, Chyi Shyuan Chern, Chih-Cheng Lin | 2018-01-09 |
| 9759997 | Pellicle assembly and method for advanced lithography | Amo Chen, Ta-Cheng Lien, Hsin-Chang Lee, Chih-Cheng Lin, Jeng-Horng Chen | 2017-09-12 |
| 9651857 | Mask and method for forming the same | Chia-Jen Chen, Hsin-Chang Lee, Ta-Cheng Lien, Anthony Yen | 2017-05-16 |
| 9366953 | Lithography mask | Hsin-Chang Lee, Chia-Jen Chen, Anthony Yen | 2016-06-14 |
| 9360749 | Pellicle structure and method for forming the same | Chia-Jen Chen, Hsin-Chang Lee, Anthony Yen | 2016-06-07 |
| 9341937 | Lithography system and method for patterning photoresist layer on EUV mask | Chia-Jen Chen, Hsin-Chang Lee, Anthony Yen | 2016-05-17 |
| 9287422 | Method for forming a photo-active layer of the solar cell | Wei-Fang Su, Chun-Wei Chen, Jih-Jen Wu | 2016-03-15 |
| 9269840 | Method for forming a solar cell with tree-like nanostructure | Wei-Fang Su, Chun-Wei Chen, Jih-Jen Wu | 2016-02-23 |
| 8974988 | Mask and method for forming the same | Ta-Cheng Lien, Hsin-Chang Lee, Anthony Yen, Chia-Jen Chen | 2015-03-10 |
| 8916482 | Method of making a lithography mask | Hsin-Chang Lee, Hung-Chang Hsieh, Chia-Jen Chen, Yih-Chen Su, Ta-Cheng Lien +1 more | 2014-12-23 |
| 8753788 | Apparatus of repairing a mask and a method for the same | Chia-Hao Yu | 2014-06-17 |
| 8679707 | Method of fabricating a lithography mask | Hsin-Chang Lee, Pei-Cheng Hsu, Chia-Jen Chen, Ta-Cheng Lien, Anthony Yen | 2014-03-25 |
| 8502068 | Photo-active layer of a multi-layered structure within a solar cell | Wei-Fang Su, Chun-Wei Chen, Jih-Jen Wu | 2013-08-06 |
| 8198531 | Solar cell having tree-like nanostructure and method for preparing the same | Wei-Fan Su, Chun-Wei Chen, Jih-Jen Wu | 2012-06-12 |