Issued Patents All Time
Showing 26–50 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11506971 | Pellicle and method of using the same | Chue-San Yoo, Hsin-Chang Lee, Pei-Cheng Hsu | 2022-11-22 |
| 11500282 | EUV photo masks and manufacturing method thereof | — | 2022-11-15 |
| 11454881 | Pellicle design for mask application | — | 2022-09-27 |
| 11402745 | Mask for EUV lithography and method of manufacturing the same | — | 2022-08-02 |
| 11360376 | Extreme ultraviolet mask and method for forming the same | — | 2022-06-14 |
| 11340525 | Pellicle and method of manufacturing same | Po Hsuan Li, Yu-Ting Lin, Huai-Tei Yang | 2022-05-24 |
| 11314169 | Robust, high transmission pellicle for extreme ultraviolet lithography systems | — | 2022-04-26 |
| 11294274 | Pellicle assembly and method for advanced lithography | Amo Chen, Ta-Cheng Lien, Hsin-Chang Lee, Chih-Cheng Lin, Jeng-Horng Chen | 2022-04-05 |
| 11156912 | Lithography mask and method for manufacturing the same | — | 2021-10-26 |
| 11143951 | Pellicle for an EUV lithography mask and a method of manufacturing thereof | — | 2021-10-12 |
| 11143952 | Pellicle removal method | Chue-San Yoo, Chih-Chiang Tu, Chien-Cheng Chen, Jong-Yuh Chang, Kun-Lung Hsieh +2 more | 2021-10-12 |
| 11137672 | Mask and method for forming the same | — | 2021-10-05 |
| 11137684 | Lithography mask with both transmission-type and reflective-type overlay marks and method of fabricating the same | Hsin-Chang Lee, Chia-Jen Chen, Chih-Cheng Lin, Anthony Yen, Chin-Hsiang Lin | 2021-10-05 |
| 11106127 | Structure of pellicle-mask structure with vent structure | — | 2021-08-31 |
| 11086215 | Extreme ultraviolet mask with reduced mask shadowing effect and method of manufacturing the same | Hsin-Chang Lee | 2021-08-10 |
| 11022874 | Chromeless phase shift mask structure and process | Hsin-Chang Lee | 2021-06-01 |
| 11016383 | Pellicle for an EUV lithography mask and a method of manufacturing thereof | — | 2021-05-25 |
| 10962873 | Extreme ultraviolet mask and method of manufacturing the same | — | 2021-03-30 |
| 10809613 | Mask for EUV lithography and method of manufacturing the same | — | 2020-10-20 |
| 10747103 | Pellicle fabrication methods and structures thereof | Hsuan-Chen Chen, Chih-Cheng Lin, Hsin-Chang Lee, Yao-Ching Ku, Wei-Jen Lo +3 more | 2020-08-18 |
| 10670959 | Pellicle and method of using the same | Chue-San Yoo, Hsin-Chang Lee, Pei-Cheng Hsu | 2020-06-02 |
| 10534256 | Pellicle assembly and method for advanced lithography | Amo Chen, Ta-Cheng Lien, Hsin-Chang Lee, Chih-Cheng Lin, Jeng-Horng Chen | 2020-01-14 |
| 10514597 | Lithography mask with both transmission-type and reflective-type overlay marks and method of fabricating the same | Hsin-Chang Lee, Chia-Jen Chen, Chih-Cheng Lin, Anthony Yen, Chin-Hsiang Lin | 2019-12-24 |
| 10394114 | Chromeless phase shift mask structure and process | Hsin-Chang Lee | 2019-08-27 |
| 10353285 | Pellicle structures and methods of fabricating thereof | Hsin-Chang Lee, Pei-Cheng Hsu, Hsuan-Chen Chen, Hsuan-I WANG, Anthony Yen | 2019-07-16 |