Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400864 | Methods and systems for improving plasma ignition stability | Hung-Yi Tsai, Hao-Ping Cheng, Ta-Cheng Lien, Hsin-Chang Lee | 2025-08-26 |
| 12366797 | EUV photo masks and manufacturing method thereof | Hung-Yi Tsai, Wei-Che Hsieh, Ta-Cheng Lien, Hsin-Chang Lee, Hao-Ping Cheng +2 more | 2025-07-22 |
| 12353120 | EUV photo masks and manufacturing method thereof | Wei-Che Hsieh, Chi-Lun Lu, Fu-Sheng Chu, Ta-Cheng Lien, Hsin-Chang Lee | 2025-07-08 |
| 12346020 | Optical assembly with coating and methods of use | Pei-Cheng Hsu, Ta-Cheng Lien, Hsin-Chang Lee | 2025-07-01 |
| 12346023 | Optical assembly with coating and methods of use | Pei-Cheng Hsu, Ta-Cheng Lien, Hsin-Chang Lee | 2025-07-01 |
| 12339582 | Photomask including fiducial mark and method of making a photomask | Hsin-Chang Lee, Chih-Cheng Lin, Chia-Jen Chen | 2025-06-24 |
| 12265322 | EUV mask blank and method of making EUV mask blank | Pei-Cheng Hsu, Ching-Fang Yu, Ta-Cheng Lien, Chia-Jen Chen, Hsin-Chang Lee | 2025-04-01 |
| 12181797 | Extreme ultraviolet mask with alloy based absorbers | Pei-Cheng Hsu, Ta-Cheng Lien, Hsin-Chang Lee | 2024-12-31 |
| 12044959 | EUV photo masks and manufacturing method thereof | Hung-Yi Tsai, Wei-Che Hsieh, Ta-Cheng Lien, Hsin-Chang Lee, Hao-Ping Cheng +2 more | 2024-07-23 |
| 12001132 | Protection layer on low thermal expansion material (LTEM) substrate of extreme ultraviolet (EUV) mask | Pei-Cheng Hsu, Ta-Cheng Lien, Shih-Che Wang, Hsin-Chang Lee | 2024-06-04 |
| 11982936 | Photomask and method of fabricating a photomask | Hsin-Chang Lee, Yen-Cheng HO, Chih-Cheng Lin, Chia-Jen Chen | 2024-05-14 |
| 11860532 | Photomask including fiducial mark and method of making a semiconductor device using the photomask | Hsin-Chang Lee, Chih-Cheng Lin, Chia-Jen Chen | 2024-01-02 |
| 11815804 | EUV mask blank and method of making EUV mask blank | Pei-Cheng Hsu, Ching-Fang Yu, Ta-Cheng Lien, Chia-Jen Chen, Hsin-Chang Lee | 2023-11-14 |
| 11592737 | EUV photo masks and manufacturing method thereof | Hung-Yi Tsai, Wei-Che Hsieh, Ta-Cheng Lien, Hsin-Chang Lee, Hao-Ping Cheng +2 more | 2023-02-28 |
| 11435660 | Photomask and method of fabricating a photomask | Hsin-Chang Lee, Yen-Cheng HO, Chih-Cheng Lin, Chia-Jen Chen | 2022-09-06 |
| 11422466 | Photomask including fiducial mark and method of making semiconductor device using the photomask | Hsin-Chang Lee, Chih-Cheng Lin, Chia-Jen Chen | 2022-08-23 |
| 11287754 | Mask blank for lithography and method of manufacturing the same | Ming-Wei Chen, Hsin-Chang Lee | 2022-03-29 |
| 11119398 | EUV photo masks | Hsin-Chang Lee, Pei-Cheng Hsu, Ta-Cheng Lien, Tzu Yi Wang | 2021-09-14 |
| 11042084 | Photomask including fiducial mark, method of patterning the photomask and method of making semiconductor device using the photomask | Hsin-Chang Lee, Chia-Jen Chen, Chih-Cheng Lin | 2021-06-22 |
| 10871721 | Mask blank for lithography and method of manufacturing the same | Ming-Wei Chen, Hsin-Chang Lee | 2020-12-22 |
| 10295899 | Photomask including fiducial mark, method of patterning the photomask and method of making semiconductor device using the photomask | Hsin-Chang Lee, Chia-Jen Chen, Chih-Cheng Lin | 2019-05-21 |