Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12429776 | Lithography method with reduced impacts of mask defects | Shinn-Sheng Yu, Wen-Chuan Wang, Ting-Hao Hsu, Sheng-Chi Chin, Anthony Yen | 2025-09-30 |
| 12265322 | EUV mask blank and method of making EUV mask blank | Ping-Hsun Lin, Pei-Cheng Hsu, Ta-Cheng Lien, Chia-Jen Chen, Hsin-Chang Lee | 2025-04-01 |
| 11815804 | EUV mask blank and method of making EUV mask blank | Ping-Hsun Lin, Pei-Cheng Hsu, Ta-Cheng Lien, Chia-Jen Chen, Hsin-Chang Lee | 2023-11-14 |
| 11150269 | Probe head for high frequency signal test and medium or low frequency signal test at the same time | Hui-Pin Yang, Shang-Jung Hsieh, Yu-Wen Chou, Huo-Kang Hsu, Chin-Tien Yang | 2021-10-19 |
| 10955746 | Lithography method with reduced impacts of mask defects | Shinn-Sheng Yu, Wen-Chuan Wang, Ting-Hao Hsu, Sheng-Chi Chin, Anthony Yen | 2021-03-23 |
| 10691017 | Pellicle for advanced lithography | Yu-Ching Lee, Chun-Hung Lin, Ting-Hao Hsu, Ching-Hsiang Chang, Sheng-Chi Chin | 2020-06-23 |
| 10126644 | Pellicle for advanced lithography | Yu-Ching Lee, Chun-Hung Lin, Ting-Hao Hsu, Ching-Hsiang Chang, Sheng-Chi Chin | 2018-11-13 |
| 9933699 | Pellicle aging estimation and particle removal from pellicle via acoustic waves | Yu-Ching Lee, Chun-Hung Lin, Sheng-Chi Chin, Ting-Hao Hsu, Mark Chang | 2018-04-03 |
| 9548209 | Method for integrated circuit fabrication | Chia-Ching Huang, Ting-Hao Hsu | 2017-01-17 |
| 9354510 | EUV mask and method for forming the same | Ting-Hao Hsu, Sheng-Chi Chin | 2016-05-31 |
| 9305346 | Method and apparatus for efficient defect inspection | Ting-Hao Hsu | 2016-04-05 |
| 9152035 | Lithographic photomask with inclined sides | Ting-Hao Hsu, Sheng-Chi Chin | 2015-10-06 |
| 8980108 | Method for integrated circuit fabrication | Ting-Hao Hsu, Chia-Ching Huang | 2015-03-17 |
| 8737717 | Method and apparatus for defect identification | Mei-Chun Lin, Ting-Hao Hsu, Sheng-Chi Chin | 2014-05-27 |
| 8691476 | EUV mask and method for forming the same | Ting-Hao Hsu, Sheng-Chi Chin | 2014-04-08 |
| 7394335 | Polarized high-order mode electromagnetic wave coupler and its coupling method | Tsun-Hsu Chang, Chao FAN | 2008-07-01 |
| 7381932 | Quasi-optical material treatment apparatus | Larry R. Barnett, Kwo Ray Chu, Tsun-Hsu Chang, Hung-Ing Chang, Wei-Yuan Chiang +3 more | 2008-06-03 |
| 7369011 | High order mode electromagnetic wave coupler and coupling method using proportional distributing waves | Tsun-Hsu Chang | 2008-05-06 |