Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12353120 | EUV photo masks and manufacturing method thereof | Wei-Che Hsieh, Chi-Lun Lu, Ping-Hsun Lin, Ta-Cheng Lien, Hsin-Chang Lee | 2025-07-08 |
| 11619806 | Microscope apparatus | Chih-Shiang Chou, Yu-Po Tang, Yan-Ying He | 2023-04-04 |
| 10866397 | Microscope apparatus | Chih-Shiang Chou, Yu-Po Tang, Yan-Ying He | 2020-12-15 |
| 10295813 | Microscope apparatus and method for phase image acquisition | Chih-Shiang Chou, Yu-Po Tang, Yan-Ying He | 2019-05-21 |
| 9400424 | Method of repairing a mask | Yuan-Chih Chu | 2016-07-26 |
| 9029050 | Method for repairing a mask | Yuan-Chih Chu | 2015-05-12 |
| 8928973 | Microscope apparatus for phase image acquisition | Chih-Shiang Chou, Yu-Po Tang, Yan-Ying He | 2015-01-06 |
| 8572520 | Optical proximity correction for mask repair | Chih-Shiang Chou, Ya-Ting Chang, Yu-Po Tang | 2013-10-29 |