Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859908 | Method to fabricate mask-pellicle system | Chun-Hao Tseng, Sheng-Chi Chin | 2020-12-08 |
| 10816891 | Photomask and fabrication method therefor | Hao-Ming Chang, Chien-Hung Lai, Cheng-Ming Lin, Hsuan-Wen Wang, Min-An Yang +2 more | 2020-10-27 |
| 10061193 | Focused radiation beam induced deposition | Hsun-Chuan Shih, Sheng-Chi Chin, Yueh-Hsun Li | 2018-08-28 |
| 9952503 | Method for repairing a mask | Yen-Kai Huang | 2018-04-24 |
| 9915866 | Focused radiation beam induced deposition | Hsun-Chuan Shih, Sheng-Chi Chin, Yueh-Hsun Li | 2018-03-13 |
| 9910350 | Method for repairing a mask | Shang-Lun Tsai, Sheng-Chi Chin, Yueh-Hsun Li | 2018-03-06 |
| 9835940 | Method to fabricate mask-pellicle system | Chun-Hao Tseng, Sheng-Chi Chin | 2017-12-05 |
| 9810978 | Method for lithography patterning | Hsun-Chuan Shih | 2017-11-07 |
| 9759998 | Efficient solution for removing EUV native defects | Yen-Kai Huang, Hsun-Chuan Shih | 2017-09-12 |
| 9664995 | Method of manufacturing an extreme ultraviolet (EUV) mask and the mask manufactured therefrom | — | 2017-05-30 |
| 9659768 | Focused radiation beam induced thin film deposition | Chia-Hao Yu | 2017-05-23 |
| 9625808 | Durable metal film deposition for mask repair | Yen-Kai Huang | 2017-04-18 |
| 9494855 | Lithography-oriented photomask repair | — | 2016-11-15 |
| 9400424 | Method of repairing a mask | Fu-Sheng Chu | 2016-07-26 |
| 9395632 | Efficient solution for removing EUV native defects | Yen-Kai Huang, Hsun-Chuan Shih | 2016-07-19 |
| 9298085 | Method for repairing a mask | Hsun-Chuan Shih | 2016-03-29 |
| 9291890 | Method for repairing a mask | Yen-Kai Huang | 2016-03-22 |
| 9274417 | Method for lithography patterning | Hsun-Chuan Shih | 2016-03-01 |
| 9134602 | Method of manufacturing an extreme ultraviolet (EUV) mask and the mask manufactured therefrom | — | 2015-09-15 |
| 9029050 | Method for repairing a mask | Fu-Sheng Chu | 2015-05-12 |
| 8921015 | Mask repair with passivation | Yueh-Hsun Li | 2014-12-30 |
| 8900777 | Apparatus and method for lithography patterning | — | 2014-12-02 |
| 8819859 | Apparatus of analyzing a sample and a method for the same | Yen-Kai Huang | 2014-08-26 |