Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10061193 | Focused radiation beam induced deposition | Sheng-Chi Chin, Yuan-Chih Chu, Yueh-Hsun Li | 2018-08-28 |
| 9915866 | Focused radiation beam induced deposition | Sheng-Chi Chin, Yuan-Chih Chu, Yueh-Hsun Li | 2018-03-13 |
| 9810978 | Method for lithography patterning | Yuan-Chih Chu | 2017-11-07 |
| 9759998 | Efficient solution for removing EUV native defects | Yen-Kai Huang, Yuan-Chih Chu | 2017-09-12 |
| 9395632 | Efficient solution for removing EUV native defects | Yen-Kai Huang, Yuan-Chih Chu | 2016-07-19 |
| 9298085 | Method for repairing a mask | Yuan-Chih Chu | 2016-03-29 |
| 9274417 | Method for lithography patterning | Yuan-Chih Chu | 2016-03-01 |