Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11619806 | Microscope apparatus | Fu-Sheng Chu, Yu-Po Tang, Yan-Ying He | 2023-04-04 |
| 10962875 | Method of mask simulation model for OPC and mask making | Hsu-Ting Huang, Ru-Gun Liu | 2021-03-30 |
| 10866397 | Microscope apparatus | Fu-Sheng Chu, Yu-Po Tang, Yan-Ying He | 2020-12-15 |
| 10495967 | Method of mask simulation model for OPC and mask making | Hsu-Ting Huang, Ru-Gun Liu | 2019-12-03 |
| 10295813 | Microscope apparatus and method for phase image acquisition | Fu-Sheng Chu, Yu-Po Tang, Yan-Ying He | 2019-05-21 |
| 9880460 | Enhanced EUV lithography system | Ching-Hsu Chang, Nian-Fuh Cheng, Wen-Chun Huang, Ru-Gun Liu | 2018-01-30 |
| 9395618 | Enhanced EUV lithography system | Ching-Hsu Chang, Nian-Fuh Cheng, Wen-Chun Huang, Ru-Gun Liu | 2016-07-19 |
| 9091930 | Enhanced EUV lithography system | Ching-Hsu Chang, Nian-Fuh Cheng, Wen-Chun Huang, Ru-Gun Liu | 2015-07-28 |
| 8928973 | Microscope apparatus for phase image acquisition | Fu-Sheng Chu, Yu-Po Tang, Yan-Ying He | 2015-01-06 |
| 8656319 | Optical proximity correction convergence control | Cheng-Cheng Kuo, Ching-Che Tsai, Tzu-Chun Lo, Chih-Wei Hsu, Hua-Tai Lin +4 more | 2014-02-18 |
| 8572520 | Optical proximity correction for mask repair | Ya-Ting Chang, Fu-Sheng Chu, Yu-Po Tang | 2013-10-29 |