Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10324369 | Methods for generating a mandrel mask | Tsung-Yu Wang, Chia-Ping Chiang, Ming-Hui Chih, Wen-Chun Huang, Tsai-Sheng Gau | 2019-06-18 |
| 9911606 | Mandrel spacer patterning in multi-pitch integrated circuit manufacturing | Chia-Ping Chiang, Ya-Ting Chang, Wen-Li Cheng, Ming-Hui Chih, Wen-Chun Huang +2 more | 2018-03-06 |
| 9880460 | Enhanced EUV lithography system | Ching-Hsu Chang, Chih-Shiang Chou, Wen-Chun Huang, Ru-Gun Liu | 2018-01-30 |
| 9627262 | Method of patterning features of a semiconductor device | Wei-Chao Chiu, Chen Chen, Chih-Ming Lai, Ming-Feng Shieh, Ru-Gun Liu +1 more | 2017-04-18 |
| 9395618 | Enhanced EUV lithography system | Ching-Hsu Chang, Chih-Shiang Chou, Wen-Chun Huang, Ru-Gun Liu | 2016-07-19 |
| 9091930 | Enhanced EUV lithography system | Ching-Hsu Chang, Chih-Shiang Chou, Wen-Chun Huang, Ru-Gun Liu | 2015-07-28 |
| 9023695 | Method of patterning features of a semiconductor device | Wei-Chao Chiu, Chen Chen, Ming-Feng Shieh, Chih-Ming Lai, Wen-Chun Huang +1 more | 2015-05-05 |
| 8945803 | Smart subfield method for E-beam lithography | Pei-Shiang Chen, Hung-Chun Wang, Jeng-Horng Chen, Cheng-Hung Chen, Shih-Chi Wang +1 more | 2015-02-03 |
| 8745550 | Fracture aware OPC | Yu-Po Tang, Chien-Fu Lee, Sheng-Wen Lin, Yong-Cheng Lin, Wen-Chun Huang +1 more | 2014-06-03 |
| 8609308 | Smart subfield method for E-beam lithography | Pei-Shiang Chen, Hung-Chun Wang, Jeng-Horng Chen, Cheng-Hung Chen, Shih-Chi Wang +1 more | 2013-12-17 |
| 8601407 | Geometric pattern data quality verification for maskless lithography | Hung-Chun Wang, Pei-Shiang Chen, Tzu-Chin Lin, Cheng-Hung Chen, Shih-Chi Wang +3 more | 2013-12-03 |
| 8473877 | Striping methodology for maskless lithography | Hung-Chun Wang, Tzu-Chin Lin, Jeng-Horng Chen, Wen-Chun Huang, Ru-Gun Liu | 2013-06-25 |
| 8468473 | Method for high volume e-beam lithography | Hung-Chun Wang, Tzu-Chin Lin, Chia-Chi Lin, Jeng-Horng Chen, Wen-Chun Huang +1 more | 2013-06-18 |