Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12130548 | Extreme ultraviolet mask with reduced wafer neighboring effect | Huan-Ling Lee, Chia-Jen Chen, Hsin-Chang Lee | 2024-10-29 |
| 12019367 | Mask blanks and methods for depositing layers on mask blank | Hsin-Chang Lee, Pei-Cheng Hsu, Ta-Cheng Lien | 2024-06-25 |
| 11815805 | Mask for extreme ultraviolet photolithography | Hsin-Chang Lee, Ta-Cheng Lien | 2023-11-14 |
| 11740547 | Method of manufacturing extreme ultraviolet mask with reduced wafer neighboring effect | Huan-Ling Lee, Chia-Jen Chen, Hsin-Chang Lee | 2023-08-29 |
| 11531262 | Mask blanks and methods for depositing layers on mask blank | Hsin-Chang Lee, Pei-Cheng Hsu, Ta-Cheng Lien | 2022-12-20 |
| 11294271 | Mask for extreme ultraviolet photolithography | Hsin-Chang Lee, Ta-Cheng Lien | 2022-04-05 |
| 11143954 | Mask patterns and method of manufacture | Ta-Cheng Lien, Chia-Jen Chen, Hsin-Chang Lee | 2021-10-12 |
| 10996553 | Extreme ultraviolet mask with reduced wafer neighboring effect and method of manufacturing the same | Huan-Ling Lee, Chia-Jen Chen, Hsin-Chang Lee | 2021-05-04 |
| 9530200 | Method and system for inspection of a patterned structure | Chia-Jen Chen, Hsin-Chang Lee | 2016-12-27 |
| 9429835 | Structure and method of photomask with reduction of electron-beam scatterring | Chia-Jen Chen, Hsin-Chang Lee | 2016-08-30 |
| 9341940 | Reticle and method of fabricating the same | Chia-Jen Chen, Ta-Cheng Lien, Hsin-Chang Lee | 2016-05-17 |