Issued Patents All Time
Showing 51–75 of 90 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9429835 | Structure and method of photomask with reduction of electron-beam scatterring | Wen-Chang Hsueh, Hsin-Chang Lee | 2016-08-30 |
| 9373552 | Method of calibrating or exposing a lithography tool | Yu-Chao Lin, Chia-Hao Hsu, Kuo-Yu Wu, Chao-Cheng Chen | 2016-06-21 |
| 9366953 | Lithography mask | Yun-Yue Lin, Hsin-Chang Lee, Anthony Yen | 2016-06-14 |
| 9360749 | Pellicle structure and method for forming the same | Yun-Yue Lin, Hsin-Chang Lee, Anthony Yen | 2016-06-07 |
| 9341940 | Reticle and method of fabricating the same | Wen-Chang Hsueh, Ta-Cheng Lien, Hsin-Chang Lee | 2016-05-17 |
| 9341937 | Lithography system and method for patterning photoresist layer on EUV mask | Yun-Yue Lin, Hsin-Chang Lee, Anthony Yen | 2016-05-17 |
| 9310675 | Extreme ultraviolet light (EUV) photomasks, and fabrication methods thereof | Tao Huang, Chih-Tsung Shih, Hsin-Chang Lee, Anthony Yen | 2016-04-12 |
| 9285673 | Assist feature for a photolithographic process | Tao Huang, Hsin-Chang Lee, Chih-Tsung Shih, Shinn-Sheng Yu, Jeng-Horng Chen +1 more | 2016-03-15 |
| 9287179 | Composite dummy gate with conformal polysilicon layer for FinFET device | Yuan-Sheng Huang, Tzu-Yen Hsieh, Ming-Ching Chang, Chao-Cheng Chen | 2016-03-15 |
| 9256142 | Pellicle mounting system and method | Yeh Lee-Chih, Hsin-Chang Lee, Anthony Yen, Ming-Jiun Yao | 2016-02-09 |
| 9256123 | Method of making an extreme ultraviolet pellicle | Chih-Tsung Shih, Tien-Hsi Lee, Shang-Chieh Chien, Shinn-Sheng Yu, Jeng-Horng Chen +1 more | 2016-02-09 |
| 9244341 | Photomask and method for forming the same | Hsin-Chang Lee, Pei-Cheng Hsu, Anthony Yen | 2016-01-26 |
| 9213232 | Reflective mask and method of making same | Pei-Cheng Hsu, Chih-Tsung Shih, Tsiao-Chen Wu, Shinn-Sheng Yu, Hsin-Chang Lee +1 more | 2015-12-15 |
| 9128384 | Method of forming a pattern | Yu-Chao Lin, Chia-Hao Hsu, Kuo-Yu Wu, Chao-Cheng Chen | 2015-09-08 |
| 9057961 | Systems and methods for lithography masks | Chih-Chiang Tu, Hsin-Chang Lee, Jong-Yuh Chang, Chun-Lang Chen | 2015-06-16 |
| 9046776 | System, method and reticle for improved pattern quality in extreme ultraviolet (EUV) lithography and method for forming the reticle | Chia-Hao Hsu, Chia-Chen Chen, Jui-Ching Wu, Shang-Chieh Chien, Chia-Ching Huang | 2015-06-02 |
| 8974988 | Mask and method for forming the same | Yun-Yue Lin, Ta-Cheng Lien, Hsin-Chang Lee, Anthony Yen | 2015-03-10 |
| 8962222 | Photomask and method for forming the same | Hsin-Chang Lee, Pei-Cheng Hsu, Anthony Yen | 2015-02-24 |
| 8916482 | Method of making a lithography mask | Hsin-Chang Lee, Yun-Yue Lin, Hung-Chang Hsieh, Yih-Chen Su, Ta-Cheng Lien +1 more | 2014-12-23 |
| 8912610 | Structure and method for MOSFETS with high-K and metal gate structure | Jr-Jung Lin, Yun-Ju Sun, Shih-Hsun Chang, Tomonari Yamamoto, Chih-Wei Kuo +2 more | 2014-12-16 |
| 8877409 | Reflective mask and method of making same | Pei-Cheng Hsu, Chih-Tsung Shih, Tsiao-Chen Wu, Shinn-Sheng Yu, Hsin-Chang Lee +1 more | 2014-11-04 |
| 8785083 | Systems and methods for lithography masks | Chih-Chiang Tu, Hsin-Chang Lee, Jong-Yuh Chang, Chun-Lang Chen | 2014-07-22 |
| 8765330 | Phase shift mask for extreme ultraviolet lithography and method of fabricating same | Chia-Tsung Shih, Pei-Chung Hsu, Shinn-Sheng Yu, Tsiao-Chen Wu, Yen-Cheng Lu +3 more | 2014-07-01 |
| 8709682 | Mask and method for forming the mask | Anthony Yen, Hsin-Chang Lee, Sheng-Chi Chin | 2014-04-29 |
| 8679707 | Method of fabricating a lithography mask | Hsin-Chang Lee, Yun-Yue Lin, Pei-Cheng Hsu, Ta-Cheng Lien, Anthony Yen | 2014-03-25 |