Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8765330 | Phase shift mask for extreme ultraviolet lithography and method of fabricating same | Chia-Tsung Shih, Shinn-Sheng Yu, Tsiao-Chen Wu, Yen-Cheng Lu, Shu-Hao Chang +3 more | 2014-07-01 |