Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9256142 | Pellicle mounting system and method | Hsin-Chang Lee, Chia-Jen Chen, Anthony Yen, Ming-Jiun Yao | 2016-02-09 |
| 8656318 | System and method for combined intraoverlay metrology and defect inspection | Hsin-Chang Lee, Chia-Jen Chen, Sheng-Chi Chin, Ting-Hao Hsu, Anthony Yen | 2014-02-18 |