Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9280046 | Method of fabricating mask | Anthony Yen, Chih-Tsung Shih, Yen-Cheng Lu, Shinn-Sheng Yu, Jeng-Horng Chen +1 more | 2016-03-08 |
| 9256142 | Pellicle mounting system and method | Yeh Lee-Chih, Hsin-Chang Lee, Chia-Jen Chen, Anthony Yen | 2016-02-09 |
| 7829248 | Pellicle stress relief | Burn Jeng Lin, Hsin-Chang Lee | 2010-11-09 |