Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11378894 | Lithography system with an embedded cleaning module | Shang-Chieh Chien, Jeng-Horng Chen, Chia-Chen Chen, Hung-Chang Hsieh, Chi-Lun Lu +3 more | 2022-07-05 |
| 10976672 | System and method for performing lithography process in semiconductor device fabrication | Jeng-Horng Chen, Chia-Chen Chen, Shu-Hao Chang, Shang-Chieh Chien, Ming-Chin Chien +1 more | 2021-04-13 |
| 10685846 | Semiconductor integrated circuit fabrication with pattern-reversing process | Ming-Chin Chien, Shu-Hao Chang, Shang-Chieh Chien, Jen-Yang Chung, Kuo-Chang Kau +1 more | 2020-06-16 |
| 10559171 | Electronic system sharing power with doorbell and power-supply method thereof | — | 2020-02-11 |
| 10459353 | Lithography system with an embedded cleaning module | Shang-Chieh Chien, Jeng-Horng Chen, Chia-Chen Chen, Hung-Chang Hsieh, Chi-Lun Lu +3 more | 2019-10-29 |
| 10274838 | System and method for performing lithography process in semiconductor device fabrication | Jeng-Horng Chen, Chia-Chen Chen, Shu-Hao Chang, Shang-Chieh Chien, Ming-Chin Chien +1 more | 2019-04-30 |
| 10067418 | Particle removal system and method thereof | Shu-Hao Chang, Chi-Lun Lu, Shang-Chieh Chien, Ming-Chin Chien, Jeng-Horng Chen +2 more | 2018-09-04 |
| 9665007 | Rotary EUV collector | Shang-Chieh Chien, Shu-Hao Chang, Tsung-Yu Chen, Tzu-Hsiang Chen, Ming-Chin Chien +2 more | 2017-05-30 |
| 9558944 | System, method and reticle for improved pattern quality in extreme ultraviolet (EUV) lithography and method for forming the reticle | Chia-Hao Hsu, Chia-Chen Chen, Shang-Chieh Chien, Chia-Jen Chen, Chia-Ching Huang | 2017-01-31 |
| 9429858 | Rotary EUV collector | Shang-Chieh Chien, Shu-Hao Chang, Tsung-Yu Chen, Tzu-Hsiang Chen, Ming-Chin Chien +2 more | 2016-08-30 |
| 9412632 | Reticle pod | Tsung-Yen Lee, Jeng-Horng Cheng | 2016-08-09 |
| 9229326 | Method for integrated circuit patterning | Yen-Cheng Lu, Shu-Hao Chang, Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen | 2016-01-05 |
| 9159559 | Lithography layer with quenchers to prevent pattern collapse | Shang-Chieh Chien, Shu-Hao Chang, Jeng-Horng Chen, Anthony Yen | 2015-10-13 |
| 9140987 | Method for lithography patterning | Shang-Chieh Chien, Shu-Hao Chang, Hsiang-Yu Chou, Ming-Chin Chien, Jeng-Horng Chen | 2015-09-22 |
| 9046776 | System, method and reticle for improved pattern quality in extreme ultraviolet (EUV) lithography and method for forming the reticle | Chia-Hao Hsu, Chia-Chen Chen, Shang-Chieh Chien, Chia-Jen Chen, Chia-Ching Huang | 2015-06-02 |
| 8563231 | Patterning process and materials for lithography | Chien-Wei Wang, Ko-Bin Kao, Wei-Liang Lin, Chia-Hsiang Lin, Ai-Jen Jung | 2013-10-22 |