| 12308233 |
Dual critical dimension patterning |
Wen-Yun Wang, Chia-Chu Liu, Hua-Tai Lin |
2025-05-20 |
| 11921434 |
Mask cleaning |
Shu-Hao Chang, Norman Chen, Jeng-Horng Chen, Ming-Chin Chien, Shang-Chieh Chien +2 more |
2024-03-05 |
| 11740563 |
Mask cleaning |
Shu-Hao Chang, Norman Chen, Jeng-Horng Chen, Ming-Chin Chien, Shang-Chieh Chien +2 more |
2023-08-29 |
| 11256179 |
Mask cleaning |
Shu-Hao Chang, Norman Chen, Jeng-Horng Chen, Ming-Chin Chien, Shang-Chieh Chien +2 more |
2022-02-22 |
| 10825684 |
Material composition and methods thereof |
Shu-Hao Chang, Chien-Chih Chen, Jeng-Horng Chen, Pi-Yeh Chia, Chi-Ren Chen +1 more |
2020-11-03 |
| 10685846 |
Semiconductor integrated circuit fabrication with pattern-reversing process |
Ming-Chin Chien, Jui-Ching Wu, Shu-Hao Chang, Shang-Chieh Chien, Jen-Yang Chung +1 more |
2020-06-16 |
| 10514610 |
Lithography patterning with a gas phase resist |
Shu-Hao Chang, Kevin Huang, Jeng-Horng Chen |
2019-12-24 |
| 10459352 |
Mask cleaning |
Shu-Hao Chang, Norman Chen, Jeng-Horng Chen, Ming-Chin Chien, Shang-Chieh Chien +2 more |
2019-10-29 |
| 10018920 |
Lithography patterning with a gas phase resist |
Shu-Hao Chang, Kevin Huang, Jeng-Horng Chen |
2018-07-10 |
| 9607833 |
System and method for photomask particle detection |
Shang-Chieh Chien, Shu-Hao Chang, Hsiang-Yu Chou, Shun-Der Wu, Chia-Chen Chen +1 more |
2017-03-28 |
| 9570302 |
Method of patterning a material layer |
Shu-Hao Chang, Kevin Huang, Jeng-Horng Chen |
2017-02-14 |
