CL

Chia-Chu Liu

TSMC: 40 patents #858 of 12,232Top 8%
Overall (All Time): #78,102 of 4,157,543Top 2%
40
Patents All Time

Issued Patents All Time

Showing 1–25 of 40 patents

Patent #TitleCo-InventorsDate
12315737 Feature patterning using pitch relaxation and directional end-pushing with ion bombardment Tzung-Hua Lin, Yi-Ko CHEN, Hua-Tai Lin 2025-05-27
12308233 Dual critical dimension patterning Kuo-Chang Kau, Wen-Yun Wang, Hua-Tai Lin 2025-05-20
11688610 Feature patterning using pitch relaxation and directional end-pushing with ion bombardment Tzung-Hua Lin, Yi-Ko CHEN, Hua-Tai Lin 2023-06-27
11392045 Method for manufacturing semiconductor device and system for performing the same Wen-Yun Wang, Hua-Tai Lin 2022-07-19
11211323 Method of fabricating field effect transistor having non-orthogonal gate electrode Shiao-Chian Yeh, Hong-Jang Wu, Kuei-Shun Chen 2021-12-28
10985261 Dummy gate structure and methods thereof Kuei-Shun Chen, Chiang Mu-Chi, Chao-Cheng Chen 2021-04-20
10859924 Method for manufacturing semiconductor device and system for performing the same Wen-Yun Wang, Hua-Tai Lin 2020-12-08
10515953 Method and structure for gap filling improvement Ying-Hao Su, Yu-Chung Su, Yu-Lun Liu, Chi-Kang Chang, Kuei-Shun Chen 2019-12-24
10418460 Dummy gate structure and methods thereof Kuei-Shun Chen, Chiang Mu-Chi, Chao-Cheng Chen 2019-09-17
10276488 Method of fabricating field effect transistor having non-orthogonal gate electrode Shiao-Chian Yeh, Hong-Jang Wu, Kuei-Shun Chen 2019-04-30
9947764 Dummy gate structure and methods thereof Kuei-Shun Chen, Chiang Mu-Chi, Chao-Cheng Chen 2018-04-17
9793268 Method and structure for gap filling improvement Ying-Hao Su, Yu-Chung Su, Yu-Lun Liu, Chi-Kang Chang, Kuei-Shun Chen 2017-10-17
9766545 Methods for small trench patterning using chemical amplified photoresist compositions Ya Hui Chang 2017-09-19
9748107 Method for removing semiconductor fins using alternating masks Tzu-Chun Lo, Min Cheng, Hsiao-Wei Su, Jeng-Shiun Ho, Ching-Che Tsai +3 more 2017-08-29
9711420 Inline focus monitoring Yuan-Yen Lo, Ming-Jhih Kuo 2017-07-18
9607835 Semiconductor device with biased feature Min-Chang Liang, Mu-Chi Chiang, Kuei-Shun Chen 2017-03-28
9507904 System and method of circuit layout for multiple cells Kuei-Shun Chen 2016-11-29
9466528 Method of making a structure Yi-Shien Mor, Kuei-Shun Chen, Yu-Lun Liu, Han-Hsun Chang, Shiao-Chian Yeh 2016-10-11
9431513 Dummy gate structure and methods thereof Kuei-Shun Chen, Chiang Mu-Chi, Chao-Cheng Chen 2016-08-30
9366969 Methodology for implementing enhanced optical lithography for hole patterning in semiconductor fabrication Kuei-Shun Chen, Norman Chen, Vencent Chang, Chin-Hsiang Lin 2016-06-14
9281205 Method for etching an ultra thin film Kuei-Shun Chen, Shang-Wern Chang, Chih-Yang Yeh 2016-03-08
9274414 Method for making a lithography mask Yu-Lun Liu, Kuei-Shun Chen, Chung-Ming Wang, Chie-Chieh Lin 2016-03-01
9184101 Method for removing semiconductor fins using alternating masks Tzu-Chun Lo, Min Cheng, Hsiao-Wei Su, Jeng-Shiun Ho, Ching-Che Tsai +3 more 2015-11-10
9129974 Enhanced FinFET process overlay mark Chi-Wen Hsieh, Chi-Kang Chang, Meng-Wei Chen, Kuei-Shun Chen 2015-09-08
9093276 Methods for small trench patterning using chemical amplified photoresist compositions Ya Hui Chang 2015-07-28