Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165923 | Method of manufacturing a semiconductor device | Chuan-Hui Lu, Ming-Feng Shieh, Ming-Wen HSIAO | 2024-12-10 |
| 11935747 | Method of manufacturing a semiconductor device | Yen-Hsin Liu, Chun-Yen Tai | 2024-03-19 |
| 11862690 | Method of manufacturing a semiconductor device | Ming-Wen HSIAO, Chun-Yen Tai, Yen-Hsin Liu, Ming-Feng Shieh | 2024-01-02 |
| 11621191 | Method for fabricating a semiconductor device | Yuan-Yen Lo, Chia-Cheng Chang, Chien-Yuan Chen | 2023-04-04 |
| 11022898 | Apparatus for EUV lithography and method of measuring focus | Yi Liu, Yuan-Yen Lo | 2021-06-01 |
| 10879119 | Method for fabricating a semiconductor device | Yuan-Yen Lo, Chia-Cheng Chang, Chien-Yuan Chen | 2020-12-29 |
| 10522413 | Method of forming source/drain contact | Yu-Hsien Lin, Hung-Chang Hsieh, Jhun Hua Chen | 2019-12-31 |
| 10451979 | Apparatus for EUV lithography and method of measuring focus | Yi Liu, Yuan-Yen Lo | 2019-10-22 |
| 10276377 | Method for patterning interconnects | Yung-Sung Yen, Yu-Hsun Chen, Chen-Hau Wu, Chun-Kuang Chen, Ta-Ching Yu +2 more | 2019-04-30 |
| 10163720 | Method of forming source/drain contact | Yu-Hsien Lin, Hung-Chang Hsieh, Jhun Hua Chen | 2018-12-25 |
| 9799567 | Method of forming source/drain contact | Yu-Hsien Lin, Hung-Chang Hsieh, Jhun Hua Chen | 2017-10-24 |
| 9711420 | Inline focus monitoring | Yuan-Yen Lo, Chia-Chu Liu | 2017-07-18 |