Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12204248 | Surface charge release in lithography developing process | Yu-Ling Tseng, Kai-Lun Tseng, Pei-Kao Li, Cheng-Yu Wu | 2025-01-21 |
| 11621191 | Method for fabricating a semiconductor device | Chia-Cheng Chang, Ming-Jhih Kuo, Chien-Yuan Chen | 2023-04-04 |
| 11022898 | Apparatus for EUV lithography and method of measuring focus | Yi Liu, Ming-Jhih Kuo | 2021-06-01 |
| 10879119 | Method for fabricating a semiconductor device | Chia-Cheng Chang, Ming-Jhih Kuo, Chien-Yuan Chen | 2020-12-29 |
| 10451979 | Apparatus for EUV lithography and method of measuring focus | Yi Liu, Ming-Jhih Kuo | 2019-10-22 |
| 9905471 | Integrated circuit structure and method forming trenches with different depths | Jhih-Yu Wang, Jhun Hua Chen, Hung-Chang Hsieh | 2018-02-27 |
| 9711420 | Inline focus monitoring | Chia-Chu Liu, Ming-Jhih Kuo | 2017-07-18 |