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Mask cleaning |
Shu-Hao Chang, Norman Chen, Jeng-Horng Chen, Kuo-Chang Kau, Shang-Chieh Chien +2 more |
2024-03-05 |
| 11740563 |
Mask cleaning |
Shu-Hao Chang, Norman Chen, Jeng-Horng Chen, Kuo-Chang Kau, Shang-Chieh Chien +2 more |
2023-08-29 |
| 11256179 |
Mask cleaning |
Shu-Hao Chang, Norman Chen, Jeng-Horng Chen, Kuo-Chang Kau, Shang-Chieh Chien +2 more |
2022-02-22 |
| 10976672 |
System and method for performing lithography process in semiconductor device fabrication |
Jui-Ching Wu, Jeng-Horng Chen, Chia-Chen Chen, Shu-Hao Chang, Shang-Chieh Chien +1 more |
2021-04-13 |
| 10685846 |
Semiconductor integrated circuit fabrication with pattern-reversing process |
Jui-Ching Wu, Shu-Hao Chang, Shang-Chieh Chien, Jen-Yang Chung, Kuo-Chang Kau +1 more |
2020-06-16 |
| 10459352 |
Mask cleaning |
Shu-Hao Chang, Norman Chen, Jeng-Horng Chen, Kuo-Chang Kau, Shang-Chieh Chien +2 more |
2019-10-29 |
| 10274838 |
System and method for performing lithography process in semiconductor device fabrication |
Jui-Ching Wu, Jeng-Horng Chen, Chia-Chen Chen, Shu-Hao Chang, Shang-Chieh Chien +1 more |
2019-04-30 |
| 10067418 |
Particle removal system and method thereof |
Shu-Hao Chang, Chi-Lun Lu, Shang-Chieh Chien, Jui-Ching Wu, Jeng-Horng Chen +2 more |
2018-09-04 |
| 9665007 |
Rotary EUV collector |
Shang-Chieh Chien, Shu-Hao Chang, Jui-Ching Wu, Tsung-Yu Chen, Tzu-Hsiang Chen +2 more |
2017-05-30 |
| 9429858 |
Rotary EUV collector |
Shang-Chieh Chien, Shu-Hao Chang, Jui-Ching Wu, Tsung-Yu Chen, Tzu-Hsiang Chen +2 more |
2016-08-30 |
| 9140987 |
Method for lithography patterning |
Shang-Chieh Chien, Shu-Hao Chang, Hsiang-Yu Chou, Jui-Ching Wu, Jeng-Horng Chen |
2015-09-22 |
| 9113531 |
Method for mixing light of LED cluster |
Chung-Hao Tien, Song-Bor Chiang |
2015-08-18 |
| 8602622 |
Backlight module |
Chung-Hao Tien, Chien-Hsiang Hung, Chih-Hong Lin |
2013-12-10 |
| D618379 |
Optical reflection shade |
Yu-Shu Chen, Chih-Ming Lai |
2010-06-22 |
| D616378 |
Heat dissipation device |
Hsueh-Chen Chang, Shan-Ju Lin |
2010-05-25 |
| 6891832 |
Adaptive fragmentation techniques implemented on a data network |
Gregory A. Fowler |
2005-05-10 |
