Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9664999 | Method of making an extreme ultraviolet pellicle | Chih-Tsung Shih, Chia-Jen Chen, Shang-Chieh Chien, Shinn-Sheng Yu, Jeng-Horng Chen +1 more | 2017-05-30 |
| 9442368 | Method of making an extreme ultraviolet pellicle | Chih-Tsung Shih, Chia-Jen Chen, Shang-Chieh Chien, Shinn-Sheng Yu, Jeng-Horng Chen +1 more | 2016-09-13 |
| 9256123 | Method of making an extreme ultraviolet pellicle | Chih-Tsung Shih, Chia-Jen Chen, Shang-Chieh Chien, Shinn-Sheng Yu, Jeng-Horng Chen +1 more | 2016-02-09 |
| 8088672 | Producing a transferred layer by implanting ions through a sacrificial layer and an etching stop layer | Ching-Han Huang, Chao-Liang Chang, Yao-Yu Yang | 2012-01-03 |
| 7459025 | Methods for transferring a layer onto a substrate | — | 2008-12-02 |
| 6486008 | Manufacturing method of a thin film on a substrate | — | 2002-11-26 |