Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12393129 | Method and device for cleaning substrates | Chen-Yang Lin, Ku-Hsiang Sung, Da-Wei Yu, Kuan-Wen Lin, Chia-Jen Chen +1 more | 2025-08-19 |
| 12032302 | Method and device for cleaning substrates | Chen-Yang Lin, Ku-Hsiang Sung, Da-Wei Yu, Kuan-Wen Lin, Chia-Jen Chen +1 more | 2024-07-09 |
| 11430671 | Ozone wafer cleaning module having an ultraviolet lamp module with rotatable reflectors | Chen-Yang Lin, Ku-Hsiang Sung, Kuan-Wen Lin, Chia-Jen Chen, Hsin-Chang Lee | 2022-08-30 |
| 11079669 | System and method for localized EUV pellicle glue removal | Tzu-Ting Chou, Kuan-Wen Lin, Chi-Lun Lu, Ting-Hao Hsu, Sheng-Chi Chin | 2021-08-03 |
| 10520805 | System and method for localized EUV pellicle glue removal | Tzu-Ting Chou, Kuan-Wen Lin, Chi-Lun Lu, Ting-Hao Hsu, Sheng-Chi Chin | 2019-12-31 |