Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12393129 | Method and device for cleaning substrates | Chung-Hsuan Liu, Chen-Yang Lin, Ku-Hsiang Sung, Da-Wei Yu, Chia-Jen Chen +1 more | 2025-08-19 |
| 12320782 | Acoustic measurement of fabrication equipment clearance | Jun DENG, Sheng-Chi Chin, Yu-Ching Lee | 2025-06-03 |
| 12085866 | Particle removing assembly and method of cleaning mask for lithography | Chen-Yang Lin, Da-Wei Yu, Li-Hsin Wang, Chia-Jen Chen, Hsin-Chang Lee | 2024-09-10 |
| 12032302 | Method and device for cleaning substrates | Chung-Hsuan Liu, Chen-Yang Lin, Ku-Hsiang Sung, Da-Wei Yu, Chia-Jen Chen +1 more | 2024-07-09 |
| 11709153 | Acoustic measurement of fabrication equipment clearance | Jun DENG, Sheng-Chi Chin, Yu-Ching Lee | 2023-07-25 |
| 11698592 | Particle removing assembly and method of cleaning mask for lithography | Chen-Yang Lin, Da-Wei Yu, Li-Hsin Wang, Chia-Jen Chen, Hsin-Chang Lee | 2023-07-11 |
| 11430671 | Ozone wafer cleaning module having an ultraviolet lamp module with rotatable reflectors | Chen-Yang Lin, Chung-Hsuan Liu, Ku-Hsiang Sung, Chia-Jen Chen, Hsin-Chang Lee | 2022-08-30 |
| 11294292 | Particle removing assembly and method of cleaning mask for lithography | Chen-Yang Lin, Da-Wei Yu, Li-Hsin Wang, Chia-Jen Chen, Hsin-Chang Lee | 2022-04-05 |
| 11079669 | System and method for localized EUV pellicle glue removal | Tzu-Ting Chou, Chung-Hsuan Liu, Chi-Lun Lu, Ting-Hao Hsu, Sheng-Chi Chin | 2021-08-03 |
| 10845342 | Acoustic measurement of film thickness | Jun DENG, Sheng-Chi Chin, Yu-Ching Lee | 2020-11-24 |
| 10794872 | Acoustic measurement of fabrication equipment clearance | Jun DENG, Sheng-Chi Chin, Yu-Ching Lee | 2020-10-06 |
| 10520805 | System and method for localized EUV pellicle glue removal | Tzu-Ting Chou, Chung-Hsuan Liu, Chi-Lun Lu, Ting-Hao Hsu, Sheng-Chi Chin | 2019-12-31 |
| 10156784 | Systems and methods of EUV mask cleaning | Ching-Wei Shen, Chi-Lun Lu | 2018-12-18 |
| 9885952 | Systems and methods of EUV mask cleaning | Ching-Wei Shen, Chi-Lun Lu | 2018-02-06 |
| 9740094 | Damage prevention on EUV mask | Chi-Lun Lu, Ching-Wei Shen, Shu-Hsien Wu | 2017-08-22 |
| 9665000 | Method and system for EUV mask cleaning with non-thermal solution | Ching-Wei Shen, Chi-Lun Lu | 2017-05-30 |
| 9658526 | Mask pellicle indicator for haze prevention | Sheng-Chi Chin, Ting-Hao Hsu, Tzu-Ting Chou, Shu-Hsien Wu | 2017-05-23 |
| 9418847 | Lithography system and method for haze elimination | Ching-Wei Shen, Chi-Lun Lu, Ting-Hao Hsu, Sheng-Chi Chin, Anthony Yen | 2016-08-16 |
| 8932958 | Device manufacturing and cleaning method | Chi-Lun Lu, Ching-Wei Shen, Ting-Hao Hsu, Sheng-Chi Chin | 2015-01-13 |
| 8598042 | Device manufacturing and cleaning method | Chi-Lun Lu, Ching-Wei Shen, Ting-Hao Hsu, Sheng-Chi Chin | 2013-12-03 |