Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11003069 | High durability extreme ultraviolet photomask | Chia-Hao Yu, Chi-Lun Lu, Chih-Tsung Shih, Jeng-Horng Chen | 2021-05-11 |
| 10642148 | High durability extreme ultraviolet photomask | Chia-Hao Yu, Chi-Lun Lu, Chih-Tsung Shih, Jeng-Horng Chen | 2020-05-05 |
| 10156784 | Systems and methods of EUV mask cleaning | Chi-Lun Lu, Kuan-Wen Lin | 2018-12-18 |
| 10061191 | High durability extreme ultraviolet photomask | Chia-Hao Yu, Chi-Lun Lu, Chih-Tsung Shih, Jeng-Horng Chen | 2018-08-28 |
| 9885952 | Systems and methods of EUV mask cleaning | Chi-Lun Lu, Kuan-Wen Lin | 2018-02-06 |
| 9740094 | Damage prevention on EUV mask | Kuan-Wen Lin, Chi-Lun Lu, Shu-Hsien Wu | 2017-08-22 |
| 9665000 | Method and system for EUV mask cleaning with non-thermal solution | Chi-Lun Lu, Kuan-Wen Lin | 2017-05-30 |
| 9418847 | Lithography system and method for haze elimination | Kuan-Wen Lin, Chi-Lun Lu, Ting-Hao Hsu, Sheng-Chi Chin, Anthony Yen | 2016-08-16 |
| 8932958 | Device manufacturing and cleaning method | Chi-Lun Lu, Kuan-Wen Lin, Ting-Hao Hsu, Sheng-Chi Chin | 2015-01-13 |
| 8598042 | Device manufacturing and cleaning method | Chi-Lun Lu, Kuan-Wen Lin, Ting-Hao Hsu, Sheng-Chi Chin | 2013-12-03 |