Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12393129 | Method and device for cleaning substrates | Chung-Hsuan Liu, Chen-Yang Lin, Da-Wei Yu, Kuan-Wen Lin, Chia-Jen Chen +1 more | 2025-08-19 |
| 12032302 | Method and device for cleaning substrates | Chung-Hsuan Liu, Chen-Yang Lin, Da-Wei Yu, Kuan-Wen Lin, Chia-Jen Chen +1 more | 2024-07-09 |
| 11430671 | Ozone wafer cleaning module having an ultraviolet lamp module with rotatable reflectors | Chen-Yang Lin, Chung-Hsuan Liu, Kuan-Wen Lin, Chia-Jen Chen, Hsin-Chang Lee | 2022-08-30 |