Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112953 | Semiconductor devices and methods of manufacturing | Wan Hsuan Hsu, Jao Sheng Huang, Yen-Chiu Kuo, Yu-Li Cheng, Ya Tzu Chen +1 more | 2024-10-08 |
| 11923199 | Method and structure of middle layer removal | Nai-Chia Chen, Wan Hsuan Hsu, Chia-Wei Wu, Neng-Jye Yang | 2024-03-05 |
| 11776818 | Semiconductor devices and methods of manufacturing | Wan Hsuan Hsu, Jao Sheng Huang, Yen-Chiu Kuo, Yu-Li Cheng, Ya Tzu Chen +1 more | 2023-10-03 |
| 11398380 | Method and structure of middle layer removal | Nai-Chia Chen, Wan Hsuan Hsu, Chia-Wei Wu, Neng-Jye Yang | 2022-07-26 |
| 10985028 | Semiconductor devices and methods of manufacturing | Wan Hsuan Hsu, Jao Sheng Huang, Yen-Chiu Kuo, Yu-Li Cheng, Ya Tzu Chen +1 more | 2021-04-20 |
| 10755972 | Semiconductor device and method | Nai-Chia Chen, Yen-Chiu Kuo, Yu-Li Cheng, Chun-Hung Chao | 2020-08-25 |
| 10658179 | Method and structure of middle layer removal | Nai-Chia Chen, Wan Hsuan Hsu, Chia-Wei Wu, Neng-Jye Yang | 2020-05-19 |
| 10354913 | Chemical clean of semiconductor device | Nai-Chia Chen, Yen-Chiu Kuo, Chun-Hung Chao, Yu-Li Cheng | 2019-07-16 |
| 9728533 | Aqueous cleaning techniques and compositions for use in semiconductor device manufacture | Shao-Yen Ku, Pei-Hung Chen, Jui-Ping Chuang | 2017-08-08 |
| 9263337 | Semiconductor device and method of manufacture | Shao-Yen Ku, Chi-Yun Tseng, Yu-Yen Hsu, Tsai-Pao Su, Hobin Chen +1 more | 2016-02-16 |
| 9117760 | Method and system for energized and pressurized liquids for cleaning/etching applications in semiconductor manufacturing | Yu-Yen Hsu, Shao-Yen Ku, Tsai-Pao Su | 2015-08-25 |
| 9048089 | Apparatus to improve internal wafer temperature profile | Yu-Yen Hsu, Shao-Yen Ku | 2015-06-02 |
| 8916429 | Aqueous cleaning techniques and compositions for use in semiconductor device manufacturing | Shao-Yen Ku, Pei-Hung Chen, Jui-Ping Chuang | 2014-12-23 |
| 8529783 | Method for backside polymer reduction in dry-etch process | Huang-Ming Chen, Chao-Cheng Chen, Hun-Jan Tao | 2013-09-10 |
| 7968506 | Wet cleaning stripping of etch residue after trench and via opening formation in dual damascene process | Syun-Ming Jang, Jyu-Horng Shieh, Chih-Yuan Ting | 2011-06-28 |
| 7713380 | Method and apparatus for backside polymer reduction in dry-etch process | Huang-Ming Chen, Chao-Cheng Chen, Hun-Jan Tao | 2010-05-11 |
| 7373941 | Wet cleaning cavitation system and method to remove particulate wafer contamination | Hun-Jan Tao, Peng-Fu Hsu | 2008-05-20 |
| 7022610 | Wet cleaning method to eliminate copper corrosion | Yih-Ann Lin, Yi-Chen Huang, Chao-Cheng Chen, Hun-Jan Tao | 2006-04-04 |
| 6974505 | Tool for cleaning substrates | Hsin-Ching Shih, Ming-Hong Hsieh, Hong-J. Tao | 2005-12-13 |
| 6864193 | Aqueous cleaning composition containing copper-specific corrosion inhibitor | Hun-Jan Tao, Peng-Fu Hsu | 2005-03-08 |