Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664235 | Photoresist removal | Shang-Yuan Yu, Jui-Chuan Chang, Shao-Fu Hsu, Shao-Yen Ku, Wen-Chang Tsai +1 more | 2023-05-30 |
| 9805946 | Photoresist removal | Shang-Yuan Yu, Shao-Yen Ku, Shao-Fu Hsu, Yuan-Chih Chiang, Wen-Chang Tsai +1 more | 2017-10-31 |
| 9781994 | Wafer cleaning | Shang-Yuan Yu, Ming-Te Chen, Chi-Fu Yu, Shao-Yen Ku, Tzu-Yang Chung +1 more | 2017-10-10 |