Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664235 | Photoresist removal | Shang-Yuan Yu, Hsiao Chien-Wen, Shao-Fu Hsu, Shao-Yen Ku, Wen-Chang Tsai +1 more | 2023-05-30 |
| 11090696 | Apparatus and method of removing photoresist layer | Shao-Yen Ku, Wen-Chang Tsai, Shang-Yuan Yu, Chien-Wen Hsiao, Fan-Yi Hsu | 2021-08-17 |
| 10486204 | Semiconductor apparatus and method of removing photoresist layer on substrate | Shao-Yen Ku, Wen-Chang Tsai, Shang-Yuan Yu, Chien-Wen Hsiao, Fan-Yi Hsu | 2019-11-26 |
| 9805946 | Photoresist removal | Shang-Yuan Yu, Shao-Yen Ku, Hsiao Chien-Wen, Shao-Fu Hsu, Yuan-Chih Chiang +1 more | 2017-10-31 |
| 9583352 | Method of etching and cleaning wafers | Wen-Chang Tsai, Shao-Yen Ku, Hsieh-Ching Wei, Yuan-Chih Chiang, Yung-Li Tsai | 2017-02-28 |
| 9349617 | Mechanisms for wafer cleaning | Shang-Yuan Yu, Shao-Yen Ku, Chien-Wen Hsiao, Hong-Jie Xu, Wen-Chang Tsai | 2016-05-24 |
| 9136149 | Loading port, system for etching and cleaning wafers and method of use | Wen-Chang Tsai, Shao-Yen Ku, Hsieh-Ching Wei, Yuan-Chih Chiang, Yung-Li Tsai | 2015-09-15 |
| 6954238 | Backlight module for homogenizing the temperature of a flat panel display device | Chen-Hua Liu, Kuo-Chung Lee, Kai Sun | 2005-10-11 |