Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9583352 | Method of etching and cleaning wafers | Wen-Chang Tsai, Shao-Yen Ku, Yuan-Chih Chiang, Jui-Chuan Chang, Yung-Li Tsai | 2017-02-28 |
| 9136149 | Loading port, system for etching and cleaning wafers and method of use | Wen-Chang Tsai, Shao-Yen Ku, Yuan-Chih Chiang, Jui-Chuan Chang, Yung-Li Tsai | 2015-09-15 |