SK

Shao-Yen Ku

TSMC: 36 patents #941 of 12,232Top 8%
📍 Zhubei City, TW: #18 of 1,506 inventorsTop 2%
Overall (All Time): #93,283 of 4,157,543Top 3%
36
Patents All Time

Issued Patents All Time

Showing 26–36 of 36 patents

Patent #TitleCo-InventorsDate
9064807 Integrated platform for improved wafer manufacturing quality Tsai-Pao Su, Wen-Chang Tsai, Chia-Wen Li, Yu-Yen Hsu 2015-06-23
9048089 Apparatus to improve internal wafer temperature profile Yu-Yen Hsu, Chun-Li Chou 2015-06-02
8926762 Apparatus and methods for movable megasonic wafer probe Ying-Hsueh Chang Chien, Ming-Hsi Yeh, Chi-Ming Yang, Chin-Hsiang Lin 2015-01-06
8916429 Aqueous cleaning techniques and compositions for use in semiconductor device manufacturing Chun-Li Chou, Pei-Hung Chen, Jui-Ping Chuang 2014-12-23
8616821 Integrated apparatus to assure wafer quality and manufacturability Chi-Ming Yang, Ming-Tsao Chiang, Yu-Fen Tzeng, Chin-Hsiang Lin 2013-12-31
8518634 Cleaning process for semiconductor device fabrication Ming-Hsi Yeh, Yu-Fu Lin, Chi-Ming Yang, Chin-Hsiang Lin 2013-08-27
8105851 Nitride film wet stripping Chung-Ru Yang, Chi-Ming Yang 2012-01-31
7776757 Method of fabricating high-k metal gate devices Simon Su-Horng Lin, Yu-Ming Lee, Chi-Ming Yang, Chyi Shyuan Chern, Chin-Hsiang Lin 2010-08-17
7585737 Method of manufacturing double diffused drains in semiconductor devices Hung-Lin Chen 2009-09-08
6703320 Successful and easy method to remove polysilicon film 2004-03-09
6455405 Using implantation method to control gate oxide thickness on dual oxide semiconductor devices 2002-09-24