Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10512946 | Gigasonic cleaning techniques | Chi-Ming Yang | 2019-12-24 |
| 10020209 | Fine temperature controllable wafer heating system | Chi-Ming Yang | 2018-07-10 |
| 9349623 | Fine temperature controllable wafer heating system | Chi-Ming Yang | 2016-05-24 |
| 9299593 | Semiconductor device cleaning method and apparatus | Ming-Hsi Yeh, Kuo-Sheng Chuang, Chi-Ming Yang, Chin-Hsiang Lin | 2016-03-29 |
| 8926762 | Apparatus and methods for movable megasonic wafer probe | Shao-Yen Ku, Ming-Hsi Yeh, Chi-Ming Yang, Chin-Hsiang Lin | 2015-01-06 |
| 8871639 | Semiconductor devices and methods of manufacture thereof | Yu-Ming Lee, Man-Kit Leung, Chi-Ming Yang | 2014-10-28 |
| 8657963 | In-situ backside cleaning of semiconductor substrate | Ming-Hsi Yeh, Kuo-Sheng Chuang, Chi-Ming Yang, Chin-Hsiang Lin | 2014-02-25 |