Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12276923 | Exhaust system with U-shaped pipes | Shih-Chang Shih, Chia-Chen Chen | 2025-04-15 |
| 11994809 | Exhaust system with u-shaped pipes | Shih-Chang Shih, Chia-Chen Chen | 2024-05-28 |
| 11681232 | Exhaust system with u-shaped pipes | Shih-Chang Shih, Chia-Chen Chen | 2023-06-20 |
| 11370062 | Multifunctional shaft apparatus | Yu-Ting Lyu, Jui-Teng Chen, Chih-Hung Chou | 2022-06-28 |
| 11054756 | Apparatus and method for cleaning reticle stage | Tung-Jung Chang, Chia-Chen Chen | 2021-07-06 |
| 10983447 | Exhaust system with u-shaped pipes | Shih-Chang Shih, Chia-Chen Chen | 2021-04-20 |
| 10792767 | Laser preheating control method and device | Yu-Ting Lu, Jui-Teng Chen, Wen CHANG, Chih-Hung Chou | 2020-10-06 |
| 10684559 | Apparatus and method for cleaning reticle stage | Tung-Jung Chang, Chia-Chen Chen | 2020-06-16 |
| 10627728 | Method for creating vacuum in load lock chamber | Tung-Jung Chang, Sheng-Kang Yu | 2020-04-21 |
| 10156794 | Positioning device for aligning semiconductor tool and overhead hoist transport system | Sheng-Kang Yu, Chia-Chen Chen | 2018-12-18 |
| 9640397 | Method of fabricating a semiconductor integrated circuit using a directed self-assembly block copolymer | Chieh-Han Wu, Chung-Ju Lee, Tien-I Bao, Tsung-Yu Chen, Shinn-Sheng Yu +1 more | 2017-05-02 |
| 8544317 | Semiconductor processing apparatus with simultaneously movable stages | Yung-Cheng Chen, Heng-Jen Lee, Chin-Hsiang Lin | 2013-10-01 |
| 8518634 | Cleaning process for semiconductor device fabrication | Ming-Hsi Yeh, Shao-Yen Ku, Chi-Ming Yang, Chin-Hsiang Lin | 2013-08-27 |
| 7098978 | Wide-viewing angle liquid crystal display | Chien-Hua Chen, Jung-Lieh Hsu, Ruei-Liang Luo | 2006-08-29 |