Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12298664 | Advanced load port for photolithography mask inspection tool | Jen-Yang Chung, Han-Lung Chang | 2025-05-13 |
| 11921431 | Advanced load port for photolithography mask inspection tool | Jen-Yang Chung, Han-Lung Chang | 2024-03-05 |
| 11592754 | Advanced load port for photolithography mask inspection tool | Jen-Yang Chung, Han-Lung Chang | 2023-02-28 |
| 11162524 | Fittable and releasable fastener | TING-JUI WANG | 2021-11-02 |
| 11054756 | Apparatus and method for cleaning reticle stage | Yu-Fu Lin, Chia-Chen Chen | 2021-07-06 |
| 10684559 | Apparatus and method for cleaning reticle stage | Yu-Fu Lin, Chia-Chen Chen | 2020-06-16 |
| 10627728 | Method for creating vacuum in load lock chamber | Yu-Fu Lin, Sheng-Kang Yu | 2020-04-21 |