Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9887095 | System and method for an etch process with silicon concentration control | Fu Yi Chang, Shao-Yen Ku | 2018-02-06 |
| 8049213 | Feature dimension measurement | Ching-Chung Su, Yi-Wei Chiu, Tzu-Chan Weng, Pin Chia Su, Chih-Cherng Jeng +1 more | 2011-11-01 |
| 7064085 | Feed forward spacer width control in semiconductor manufacturing | Wen-Ting Tsai, Jao Sheng Huang, Chen-Hsiang Leu | 2006-06-20 |
| 6972241 | Method of forming an STI feature to avoid electrical charge leakage | Jao Sheng Huang, Wen-Ting Tsai, Chen-Hsiang Leu | 2005-12-06 |