Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12085585 | Particle image velocimetry of extreme ultraviolet lithography systems | Chi-Ming Yang, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2024-09-10 |
| 11680958 | Particle image velocimetry of extreme ultraviolet lithography systems | Chi-Ming Yang, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2023-06-20 |
| 11029324 | Particle image velocimetry of extreme ultraviolet lithography systems | Chi-Ming Yang, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2021-06-08 |