Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400915 | Metrology method | Chi-Ming Yang | 2025-08-26 |
| 12359318 | Mechanisms for supplying process gas into wafer process apparatus | — | 2025-07-15 |
| 11854851 | Interface tool | Jyh-Shiou Hsu, Chyi-Tsong Ni, Mu-Tsang Lin | 2023-12-26 |
| 11652007 | Metrology method | Chi-Ming Yang | 2023-05-16 |
| 11443959 | Semiconductor manufacturing system and control method | — | 2022-09-13 |
| 11414759 | Mechanisms for supplying process gas into wafer process apparatus | — | 2022-08-16 |
| 11127629 | Semiconductor device and fabricating method thereof | — | 2021-09-21 |
| 10867812 | Semiconductor manufacturing system and control method | — | 2020-12-15 |
| 10755953 | Cluster tool techniques with improved efficiency | Tsung-Hsun Yu, Victor Lu | 2020-08-25 |
| 10510566 | Cluster tool techniques with improved efficiency | Tsung-Hsun Yu, Victor Lu | 2019-12-17 |
| 10460999 | Metrology device and metrology method thereof | Chi-Ming Yang | 2019-10-29 |
| 10121653 | Bottom-up PEALD proces | Lin-Jung Wu, Chi-Ming Yang | 2018-11-06 |
| 10002780 | Method of manufacturing a semiconductor structure | Victor Lu, Tsung-Hsi Yang | 2018-06-19 |
| 9633856 | Method of forming a singe metal that performs N and P work functions in high-K/metal gate devices | — | 2017-04-25 |
| 9543141 | Method for curing flowable layer | Chi-Ming Liao, Ker-Hsun LIAO, Chun Liu | 2017-01-10 |
| 9435048 | Layer by layer electro chemical plating (ECP) process | Chi-Ming Yang | 2016-09-06 |
| 9331168 | Semiconductor structure and manufacuturing method of the same | Lin-Jung Wu | 2016-05-03 |
| 9184045 | Bottom-up PEALD process | Lin-Jung Wu, Chi-Ming Yang | 2015-11-10 |
| 9070681 | Method of forming a single metal that performs N and P work functions in high-K/metal gate devices | — | 2015-06-30 |
| 8932921 | N/P metal crystal orientation for high-k metal gate Vt modulation | Chi-Ming Yang, Chyi Shyuan Chern, Chin-Hsiang Lin | 2015-01-13 |
| 8778754 | Method of forming a single metal that performs N and P work functions in high-K/metal gate devices | — | 2014-07-15 |
| 8623468 | Methods of fabricating metal hard masks | Lin-Jung Wu, Chi-Ming Yang, Chin-Hsiang Lin | 2014-01-07 |
| 7193325 | Reliability improvement of SiOC etch with trimethylsilane gas passivation in Cu damascene interconnects | Zhen-Cheng Wu, Bi-Troug Chen, Weng Chang, Syun-Ming Jang | 2007-03-20 |
| 7138337 | Methods of forming tungsten contacts by chemical vapor deposition | — | 2006-11-21 |