Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12084762 | Semiconductor processing tool and methods of operation | Wei-Ming Wang, Yen-Hsing Chen, Lun-Kuang Tan, Yi-Chen Ho | 2024-09-10 |
| 12000455 | Systems and methods for reducing vibration of apparatuses | Yi-Chen Ho, Chih Ping Liao, Chien-Ting Lin, Jie-Ying YANG, Wei-Ming Wang +1 more | 2024-06-04 |
| 11986869 | Method of cleaning, support, and cleaning apparatus | Yi-Chen Ho, Chih Ping Liao, Chi-Hsun LIN | 2024-05-21 |
| 9543141 | Method for curing flowable layer | Chi-Ming Liao, Chun Liu, Su-Horng Lin | 2017-01-10 |
| 9373529 | Process tool having third heating source and method of using the same | Su-Hao Liu, Chien-Hung Lin, Ziwei Fang | 2016-06-21 |