Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11441221 | Method of performing atomic layer deposition | Po-Hsien Cheng, Chung-Ting Ko, Tze-Liang Lee, Chi On Chui | 2022-09-13 |
| 10755953 | Cluster tool techniques with improved efficiency | Su-Horng Lin, Victor Lu | 2020-08-25 |
| 10510566 | Cluster tool techniques with improved efficiency | Su-Horng Lin, Victor Lu | 2019-12-17 |
| 10109467 | Advanced exhaust system | Shih-Wei Hung, Chia-Chiung Lo, Chien-Feng Lin | 2018-10-23 |