Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10144109 | Polisher, polishing tool, and polishing method | Teng-Chun Tsai, Shen-Nan Lee, Yung-Cheng Lu, Shwang-Ming Jeng, Yee-Chia Yeo | 2018-12-04 |
| 10109467 | Advanced exhaust system | Shih-Wei Hung, Chien-Feng Lin, Tsung-Hsun Yu | 2018-10-23 |
| 10103262 | Method of forming a finFET structure with high quality EPI film | Shih-Wei Hung, Chien-Feng Lin | 2018-10-16 |
| 10043691 | Control wafer making device | Shih-Wei Hung, Chien-Feng Lin | 2018-08-07 |
| 9881821 | Control wafer making device and method for measuring and monitoring control wafer | Shih-Wei Hung, Chien-Feng Lin | 2018-01-30 |
| 9721826 | Wafer supporting structure, and device and method for manufacturing semiconductor | Chih-Yu Ma, Yii-Chi LIN, Zheng-Yang Pan | 2017-08-01 |